Go directly to content Go directly to font size and contrast

Project Details

Institution

Print View

RI Research Instruments GmbH

Address Friedrich-Ebert-Straße 1
51429 Bergisch Gladbach
Deutschland

51429 Bergisch Gladbach

Projects

Research Grants
- Completed projects
  - Resolution and throughput scalability limits of a compact EUV nanopatterning tool - Erkenntnistransfer-Projekt
    (Applicant Holly, Carlo )

© 2024 DFG Disclaimer / Copyright / Privacy Policy