Go directly to content Go directly to font size and contrast

Project Details

Institution

Print View

Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM)
Abteilung Präzisionsoberflächen

Address Permoserstraße 15
04318 Leipzig
Deutschland

GERiT This institution in GERiT

04318 Leipzig

Projects

Research Grants
- Current projects
  - Precise processing of optical glass by laser-induced reactive plasma etching at atmospheric pressure
    (Applicants Ehrhardt, Martin ; Zimmer, Klaus )
- Completed projects
  - Deposition of epitaxial Ga2O3 and (AlxGa1-x)2O3 thin films by ion beam sputtering: a systematic study
    (Applicant Kalanov, Ph.D., Dmitry )
New Instrumentation for Research
- Current projects
  - A liquid metal arc plasma source for the high-rate deposition of wide bandgap semiconductor films
    (Applicants Anders, André ; Kalanov, Ph.D., Dmitry )

© 2026 DFG Disclaimer / Copyright / Privacy Policy