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Dr. Lars Rebohle

Address Helmholtz-Zentrum Dresden-Rossendorf (HZDR)
Institut für Ionenstrahlphysik und Materialforschung
Post Office Box 51 01 19
01314 Dresden

ORCID-ID 0000-0002-8066-6392

Projects

As Applicant
- Completed projects
  - Atomic layer deposited dopant oxide films for doping of germanium and silicon-germanium substrates: Deposition – Flash Lamp Annealing – SIMS metrology (Research Grants)

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