Project Details
Person
Dmitry Kalanov, Ph.D.
Address
Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM)
Abteilung Präzisionsoberflächen
Permoserstraße 15
04318 Leipzig
ORCID-ID 0000-0002-3833-0772
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As Applicant
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Current projects
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A liquid metal arc plasma source for the high-rate deposition of wide bandgap semiconductor films (New Instrumentation for Research)
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Completed projects
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Current projects
