Simulations of technical plasmas in the frequency range between DC to MW (C04)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

Development of a novel energy-conserving implicit Particle-in-Cell (PIC) approach in the second phase of the project has opened an unprecedented opportunity to simulate kinetically, non-locally and self-consistently all types of plasmas studied experimentally in the framework of the SFB. Codes, which are based on this approach and are massively parallelized on graphics processing units, as well as fluid-based codes will be used in the third phase to contribute to the fundamental understanding of the most important plasma processes taking place in the corresponding plasma reactors in order to optimize and better control them. This will include modeling of the thin film deposition, to which end the plasma and film growth models will be integrated.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Professor Dr. Ralf-Peter Brinkmann, until 6/2018; Dr. Denis Eremin, since 7/2014; Professor Dr.-Ing. Thomas Mussenbrock, until 6/2014