Impact of Plasma Properties on Coating Properties in Pulsed High Power Plasmas (C06)

• Subject Area: Coating and Surface Technology
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

C06 as a subproject in the plasma surface model (PSM) focuses on the validation of the methodology for the process analysis in a high-volume coating unit and on the transfer of the developed plasma diagnostics methods to a production-capable process diagnostics for pulsed high-performance plasmas. For the first time, the substrate-sided cleaning efficiency of the plasma etching is being investigated diagnostically in order to increase the compound adhesion on steel and plastics substrates. A further focus is the development and validation of artificial neural networks for the correlation of process and plasma, plasma and coating as well as coating and system. C06 offers a central contribution to the overcoming of the empirical coating development.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Major Instrumentation: Plasmamonitorsystem
• Instrumentation Group: 8330 Vakuumbedampfungsanlagen und -präparieranlagen für Elektronenmikroskopie
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Dr.-Ing. Nazlim Bagcivan, from 7/2014 until 8/2014; Professorin Dr.-Ing. Kirsten Bobzin; Dr.-Ing. Tobias Brögelmann, from 7/2018 until 2/2021