Project Details
Projekt
Actuators and sensors based on multifunctional nanomembranes
Subject Area
Microsystems
Term
from 2011 to 2018
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 195215523
Delaminated and self-supporting nanomembranes are considered as structures with unique and outstanding properties. During the first period of the Forschergruppe 1713, already some aspects of their great potential were demonstrated. Consequently, the next step of this ongoing development should be the further extend of the sensor functionalities as well as the combination with actuation concepts. By combining sensor and actuator functionalities on three dimensional nanomembranes, a new class of smart and intelligent nanostructures can be created.The fabrication of three-dimensional structures made of two-dimensional nanomenbranes is based on intrinsic tensed thin-films. By the integration of actuator layers (e.g. piezocletrical thin-films, electroactive polymers, photoactive polymers) the transformation between the two-dimensional and the three-dimensional state should become controllable. In a first iteration external stimuli such as electrical, thermal or optical impulses are supposed to initiate the transformation process. The followed coupling of the sensor and actuator functionalities will eventually lead to an autonomous respond of the nanostructures.Driven by the integration of electrode structures into rolled-up nanomembranes, the level of integration of a single tube will be extended to several actuator and sensor functions (Fig. 1.a). This includes, but is not limited to, electro osmotic pumping, electrochemical analysis as well as the electric and thermal affection of the surrounding medium. To further extend the optical functionalities towards an efficient on-chip sensor platform, the optical sensors should be readout and controlled in parallel with at least the same but aimed enhanced signal quality. With the help of integrated wave guides, shown in Fig. 1.b, it is intended not only to address several sensors at once, but also to have the opportunity to implement both, the light source for the stimulation and the optical read out of the sensor elements directly on chip to eliminate the need of external devices. Project goals:Preparation of multifunctional three-dimensional micro- and nanostructures made of two dimensional nanomembranes.Integration of different actuator and sensor functionalities.Enhancement of the transmission of optical information by integrated wave guides.Preparation of multilayer chip Systems.Controlled or autonomous transformation between three- and two-dimensional configurations by integrated controllable layers and layer stacks.Fluidic transportation by means of three dimensional arrays of electrodes.Thermal control and manipulation of small analyte volumes in short cycle times.
DFG Programme
Research Units
Subproject of
FOR 1713:
Sensoric Micro- and Nanosystems
