Scanning Probe Processing of 2D Materials

• Applicant: Professor Dr.-Ing. Sergej Fatikow
• Subject Area: Synthesis and Properties of Functional Materials ; Automation, Mechatronics, Control Systems, Intelligent Technical Systems, Robotics ; Microsystems ; Physical Chemistry of Molecules, Liquids and Interfaces, Biophysical Chemistry ; Production Automation and Assembly Technology
• Term: from 2016 to 2021
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 315857893

Two-dimensional (2D) materials have attracted a lot of attention within the last few years owing the unique properties that emerge when these materials are isolated. Thus, the interest to apply the inherent properties of 2D materials in different kinds of novel applications constantly increases.So far, most of the prototypic devices that incorporate 2D materials have been fabricated by implementing resist-based, wet-chemical lithographical techniques. However, these resist-based processes commonly leave substantial amounts of residuals that contaminate the 2D materials and induce considerable deteriorations of their excellent and desired properties. Hence, the development of resist-free and reliable lithographical procedures is of crucial importance for exploiting the full performance potential of devices based on 2D materials.A promising methodology for enabling resist-free lithographical processing of 2D materials is based on the scanning probe approach that is capable of inducing local modifications of materials with nanoscale spatial resolution. However, until now, thorough studies of scanning probe based lithographical processes on 2D materials are still limited or even unavailable.This project aims at inducing and evaluating scanning probe based lithographical processes on selected 2D materials. To achieve this goal, a tailored robotic multiprobe setup will be applied, enabling and facilitating direct and fast classification, modification as well as characterization procedures. In this way, systematic studies focusing on critical process parameter of scanning probe based lithographical processes on 2D materials will become feasible allowing to gain a deeper knowledge on the relevant physicochemical processes.

• DFG Programme: Research Grants