Microstructured Carbon/SiCX (X=O, N)-Based High Temperature Strain Gauge
Final Report Abstract
The foundation of this work was laid out based on the efficiency of silicon oxycarbide (SiOC) as a functional material for piezoresistive device applications. The realization of a cost-efficient strain gauge which can operate at elevated temperature was the main objective of this work. In cooperation between the Dispersive Solids group of Prof. Ralf Riedel and EMK of Prof. Helmut Schlaak†, this project has successfully completed the goal to have a comprehensive understanding of the piezoresistive behavior of silicon oxycarbide (SiOC) thin films. Furthermore, a fully-realized SiOC-based strain gauge prototype was fabricated and evaluated to have an ultrahigh gauge factor (GF ~ 5000) at elevated temperature up to 700 °C that are superior to conventional metallic and silicon-based strain gauges. As a main impact of the project, the strain gauges based on C/SiOC ceramic thin films will allow low-cost piezoresistive sensing at elevated temperatures and in harsh environmental conditions. At the same time, no expensive sensor electronics will be needed, as C/SiCX typically provides high GF values of the order of 103, i.e., a high sensor sensitivity. The results achieved within the project enables the development of pressure sensing devices for gas turbines or gasification reactors.
Publications
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Compressive thermal stress and microstructure-driven charge carrier transport in silicon oxycarbide thin films. Journal of the European Ceramic Society, 41(13), 6377-6384.
Ricohermoso, Emmanuel; Klug, Florian; Schlaak, Helmut; Riedel, Ralf & Ionescu, Emanuel
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Electrically conductive silicon oxycarbide thin films prepared from preceramic polymers. International Journal of Applied Ceramic Technology, 19(1), 149-164.
Ricohermoso, Emmanuel III; Klug, Florian; Schlaak, Helmut; Riedel, Ralf & Ionescu, Emanuel
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Piezoresistive carbon-containing ceramic nanocomposites – A review. Open Ceramics, 5, 100057.
Ricohermoso, Emmanuel; Rosenburg, Felix; Klug, Florian; Nicoloso, Norbert; Schlaak, Helmut F.; Riedel, Ralf & Ionescu, Emanuel
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Hierarchical microstructure growth in a precursor‐derived SiOC thin film prepared on silicon substrate. International Journal of Applied Ceramic Technology, 20(2), 735-746.
Ricohermoso, Emmanuel III; Heripre, Eva; Solano‐Arana, Susana; Riedel, Ralf & Ionescu, Emanuel
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Microstrain-range giant piezoresistivity of silicon oxycarbide thin films under mechanical cyclic loads. Materials & Design, 213, 110323.
Ricohermoso, Emmanuel; Klug, Florian; Schlaak, Helmut; Riedel, Ralf & Ionescu, Emanuel
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SiOC-Based Strain Gauge with Ultrahigh Piezoresistivity at High Temperatures. ACS Applied Engineering Materials, 1(4), 1093-1105.
Ricohermoso, Emmanuel; Solano-Arana, Susana; Fasel, Claudia; Riedel, Ralf & Ionescu, Emanuel
