Optimized Scheduling for Semiconductor Manufacturing Facilities with Vehicle-Free Transport Systems

• Applicant: Professor Dr.-Ing. Klaus Kabitzsch
• Subject Area: Production Systems, Operations Management, Quality Management and Factory Planning ; Data Management, Data-Intensive Systems, Computer Science Methods in Business Informatics ; Theoretical Computer Science
• Term: from 2019 to 2021
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 415848118

• Final Report Year: 2024

No abstract available

Publications

• Analysis of internal logistic systems based on event logs. 2010 IEEE 15th Conference on Emerging Technologies & Factory Automation (ETFA 2010), 1-8. IEEE.
  Vasyutynskyy, V.; Gellrich, A.; Kabitzsch, K. & Wustmann, D.
  
• Offline-Analyse, Modellierung und Simulation von Transportsystemen in der Halbleiterproduktion. In Tagungsband der 14. ASIM Fachtagung Simulation in Produktion und Logistik, Karlsruhe, pages 269-276, October
  Thomas Wagner, André Gellrich, Volodymyr Vasyutynskyy & Klaus Kabitzsch
  
• Modeling of transport times in partly observable factory logistic systems based on event logs. ETFA2011, 1-7. IEEE.
  Gellrich, Andre; Wagner, Thomas; Vasyutynskyy, Volodymyr & Kabitzsch, Klaus
  
• Event-based recognition and source identification of transient tailbacks in manufacturing plants. Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC). IEEE.
  Schwenke, Clemens; Wagner, Thomas; Gellrich, Andre & Kabitzsch, Klaus
  
• Modeling and wafer defect analysis in semiconductor automated material handling systems. Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC), 1-12. IEEE.
  Wagner, Thomas; Schwenke, Clemens & Kabitzsch, Klaus
  
• Automated planning, execution and evaluation of simulation experiments of semiconductor AMHS. 2013 Winter Simulations Conference (WSC), 3891-3904. IEEE.
  Wagner, Thomas; Schwenke, Clemens; Kabitzsch, Klaus & Schneider, Germar
  
• Event Based Identification and Prediction of Congestions in Manufacturing Plants. IFIP Advances in Information and Communication Technology, 376-390. Springer Berlin Heidelberg.
  Schwenke, Clemens; Wagner, Thomas & Kabitzsch, Klaus
  
• Automated planning and creation of simulation experiments with a domain specific ontology for semiconductor manufacturing AMHS. Proceedings of the Winter Simulation Conference 2014, 2628-2639. IEEE.
  Wagner, Thomas; Gellrich, Andre; Schwenke, Clemens; Kabitzsch, Klaus & Schneider, Germar
  
• Continuous flow transport scheduling for conveyor-based AMHS in wafer fabs. 2017 Winter Simulation Conference (WSC), 3588-3599. IEEE.
  Schwenke, Clemens & Kabitzsch, Klaus