Fun2D+ | 3D functional mesoscopic system based on 2D materials
Final Report Abstract
This project aimed at developing a technology for miniaturized electronic system involving the fabrication of initially flat starting geometries with established lithography and pattern transfer techniques. Using shape morphing technologies such as MEMS origami, flat structures were transformed into three-dimensional objects by using out-of-plane rotations. As basic element, a cube was used. The starting structure for the cube was a cube net as flattened 2D representation. The cube facets and hinges between them were realized from atomic layer deposited Al2O3 thin films (< 100 nm). The exploiting shape morphing was based on mechanical properties (thermal expansion coefficient) mismatching and heating during the release step of the cube net using dry reactive etching and structural heating. Novel transistor architecture involving graphene layers as 2D materials were realized. A graphene adjustable-barriers transistor (GABT) and a hot electron transistor were patterned. A silicon–graphene–germanium GABT with an ultra-high current gain was demonstrated. A novel hot electron transistor structure with a record output current density of 800 A cm−2 and a high current gain α was fabricated using a scalable fabrication approach. Those graphene devices can be the basis for including electronics to the miniaturized system in further developments.
Publications
-
Thermal NIL-based graphene patterning for permeable base heterojunction transistors NNT2019
L.S.D. Antony, C. Strobel, R. Kirchner, C.A. Chavarin, C. Wenger, M. Albert & J. W. Bartha
-
Development of a graphene field-effect transistor for the fabrication of functional mesobots, Global Advanced Materials & Surfaces International Conference, 2022 (Paris)
J. Reif, R. Kirchner, C. Strobel, J. Zhang, M. Albert, J. W. Bartha & T. Mikolajick
-
MEMS origami using Al2O3 and dry release for facet-based device integration, Proc. 48th Int. Conf. Micro Nano Engineering (MNE), 2022 (Leuven, Belgium)
Zhang, J. Reif, C. Strobel, P. Chava, A. Erbe, T. Mikolajick, A. Voigt & R. Kirchner
-
Novel Graphene Adjustable-Barrier Transistor with Ultra-High Current Gain. ACS Applied Materials & Interfaces, 14(34), 39249-39254.
Strobel, Carsten; Chavarin, Carlos A.; Richter, Karola; Knaut, Martin; Reif, Johanna; Völkel, Sandra; Jahn, Andreas; Albert, Matthias; Wenger, Christian; Kirchner, Robert; Bartha, Johann W. & Mikolajick, Thomas
-
Direct writing immersion laser lithography on graphene monolayers using 2-photon absorption, Proc. Int. Conf. Electron Ion Photon Beam Nanotechnology, 2023 (San Francisco)
J. Zhang, J. Reif, S. Yang, C. Strobel, K. Estel, T. Mikolajick & R. Kirchner
-
Direct writing immersion laser lithography on graphene monolayers using two-photon absorption. Journal of Vacuum Science & Technology B, 41(6).
Zhang, Jianran; Strobel, Carsten; Estel, Kathrin; Mikolajick, Thomas & Kirchner, Robert
-
Dry release of MEMS Al2O3 origami for facetbased device integration with assistance of SU-8 reinforcement and folding stopping bars, Proc. 49th Int. Conf. Micro Nano Engineering (MNE), 2023 (Berlin)
J. Zhang, C. Strobel, T. Mikolajick & R. Kirchner
-
Dry release of MEMS origami using thin Al2O3 films for facet-based device integration. Micro and Nano Engineering, 19, 100179.
Zhang, J.; Reif, J.; Strobel, C.; Chava, P.; Erbe, A.; Voigt, A.; Mikolajick, T. & Kirchner, R.
-
High Gain Graphene Based Hot Electron Transistor with Record High Saturated Output Current Density. Advanced Electronic Materials, 10(2).
Strobel, Carsten; Chavarin, Carlos A.; Knaut, Martin; Völkel, Sandra; Albert, Matthias; Hiess, Andre; Max, Benjamin; Wenger, Christian; Kirchner, Robert & Mikolajick, Thomas
