Xenonbasiertes Focused Ion Beam Rasterelektronen-Mikroskop (FIB-REM) mit integrierter RAMAN-Spektroskopie

• Subject Area: Production Technology
• Term: Funded in 2020
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 442921285

At the Chair of Factory Automation and Production Systems (FAPS) a xenon-based Focused Ion Beam (FIB) - Scanning Electron Microscope (FIB-REM) with integrated RAMAN spectroscopy is to be acquired for about 1.3 million € through funding by the DFG. The Friedrich-Alexander-University Erlangen-Nuremberg enjoys an excellent worldwide reputation in the fields of Material Sciences and Process Research. In particular, the new techniques researched at FAPS for the production of mechatronic functions, such as the laser-structured metallization of spatial circuit carriers (MID), the additive production of power electronic assemblies using selective laser melting (SLM) or cold active plasma metallization (CAPM) and the printing of electronic and optical functions (antennas, PV, OLED, sensors, etc.) on 3D surfaces with ink-, nano- or piezo jetting, are unique worldwide. The generative production of artificial muscles, organ models or a mechatronic iris for aperture control in the human eye on the basis of dielectric elastomer actuators is also unprecedented. The internationally leading research activities in the fields of assembly and connection technology of miniaturized electronic modules by means of diffusion soldering and silver sintering, electrical contacting in electrical machine construction by means of laser or ultrasonic welding as well as the analysis of the reliability of connectors also require a profound understanding of the geometric details and material structure as well as the interrelationships between material, process, environmental conditions and plant specifications. In order to understand the investigated processes more precisely and to open up new potentials, access to advanced techniques and instruments for the analysis of material condition and behaviour on an atomic level is a basic prerequisite. Scanning electron microscopy (SEM) is state of the art. The combination of the SEM with a xenon-based Focused Ion Beam (FIB) and a RAMAN spectroscopy opens up completely new possibilities and is not yet available at the FAU.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Xenonbasiertes Focused Ion Beam Rasterelektronen-Mikroskop (FIB-REM) mit integrierter RAMAN-Spektroskopie
• Instrumentation Group: 5130 Sonstige spezielle Elektronenmikroskope
• Applicant Institution: Friedrich-Alexander-Universität Erlangen-Nürnberg
• Leader: Professor Dr.-Ing. Jörg Ernst Franke