Project Details
Projekt
Vertikal-FET in "Oberflächennaher Si-Bulk-Mikromechanik (C 05)
Subject Area
Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term
from 2001 to 2004
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5479322
No abstract available
DFG Programme
Collaborative Research Centres
Subproject of
SFB 379:
Micromechanical Sensor and Actuator Arrays
Applicant Institution
Technische Universität Chemnitz
Project Head
Professor Dr.-Ing. Gunter Ebest (†)
