Project Details
Projekt
Electron-Beam Evaporator
Subject Area
Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
Term
Funded in 2023
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 518255949
Superconducting circuits constitute one of today's most promising platforms to build quantum information processing systems and to study fundamental aspects of quantum physics. Considerable research efforts in both academia and industry therefore aim to further understand and improve the properties of these devices. The fabrication of superconducting circuit devices relies on large-scale technical infrastructure, which is only available in very few places in Germany. The Friedrich-Alexander University in Erlangen has now set out to become a leading center for quantum technology and for the development of superconducting quantum devices in particular. The fabrication of superconducting quantum devices uses superconducting thin-films desposited with high quality on a substrate material and patterns these films using micro- and nanoscale lithography and etching techniques. The quality of materials and the interfaces between them is thereby critical in order to preserve the quantum-mechanical coherence properties. The electron-beam evaporator which we hereby apply for will thus be one of the essential purchases of the newly established laboratory at the chair of experimental physics. It will enable the fabrication of superconducting thin-films and Josephson tunnel junctions and will therefore be an essential requirement for all of the planned research activities.
DFG Programme
Major Research Instrumentation
Major Instrumentation
Elektronenstrahlverdampfer
Instrumentation Group
8380 Schichtdickenmeßgeräte, Verdampfungs- und Steuergeräte (für Vakuumbedampfung, außer 833)
Applicant Institution
Friedrich-Alexander-Universität Erlangen-Nürnberg
