Laterale Depositionssteuerung von Nanometerpartikeln für die Mikroelektronik

• Applicant: Professor Dr. Franz-Josef Tegude
• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 2000 to 2003
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5205782

No abstract available

• DFG Programme: Research Grants
• Participating Person: Professor Dr.-Ing. Heinz Fissan