Project Details
Projekt
Quantitative study of the plasma-solid interface and its utilization in treatment of 2D materials
Subject Area
Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
Term
since 2024
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 530936824
The main goal of this project is to study quantitatively the plasma-surface interaction mechanisms and to identify the microscopic processes resulting in plasma-induced effects at the solid surface of classic and novel materials by in situ measuring and tuning the fluxes of reactive plasma species towards the surface and following ex situ the induced changes in the material. We will focus on the study of plasma interaction with classic materials such as metals and oxides on one hand, to provide the missing knowledge about ion and electron interaction, and on the treatment of novel 2D materials on the other hand, to understand the plasma interaction with these sensitive materials and to open ways to generate materials with new properties. The research will be performed on two especially for this project developed plasma reactors. The nonequilibrium plasmas in both reactors will be characterized by conventional (e.g., Langmuir probe, mass spectrometry) and non-conventional (e.g., calorimetric and force probes) diagnostics to gain insight into the energy and particle fluxes from the plasma to the surface. The reactor with symmetric electrode geometry allows the comparison of the experimental data with plasma simulation, providing in this way information about surface processes. The reactor will be updated in such a way that thin films of material of interest can be deposited and modified inside it without breaking the vacuum. The other reactor has an inverted electrode geometry and combines inductive and capacitive power coupling, which allows the control of ion energy and direct measurements at the electrode with treated material. This reactor will be used to analyze the treatment of graphene and transition metal dichalcogenides as examples of 2D materials.
DFG Programme
Research Grants
International Connection
Hungary
Co-Investigators
Professor Dr. Lorenz Kienle; Professor Dr. Kai Rossnagel
Cooperation Partner
Dr. Zoltan Donko
