CVD-Prozesse mit neuartigen metallorganischen Precursoren zur Herstellung von hoch-Epsilon Gatedielektrika und metallischen Gatelektroden zukünftiger CMOS-Generation

• Applicant: Professor Dr. Wolfgang A. Herrmann
• Subject Area: Organic Molecular Chemistry - Synthesis and Characterisation
• Term: from 2001 to 2004
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5313534

No abstract available

• DFG Programme: Priority Programmes
• Subproject of: SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes
• Participating Persons: Dr.-Ing. Anton Bauer; Professor Dr. Lothar Frey (†); Professor Dr. Peter Härter