Parallelisierte taktile Messtechnik für Mikrostrukturen

• Applicants: Professor Dr. Stephanus Büttgenbach; Professor Dr.-Ing. Rainer Tutsch
• Subject Area: Microsystems
• Term: from 2004 to 2011
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5436775

No abstract available

• DFG Programme: Priority Programmes
• Subproject of: SPP 1159: New Strategies for Measurement and Test Techniques for Production of Microsystems and Nanostructures