Measuring station for integrated high frequency circuits at 330-750 GHz

• Subject Area: Electrical Engineering and Information Technology
• Term: Funded in 2024
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 544357669

The measuring station for integrated high-frequency circuits (HFIC measuring station) consists of various components in the two waveguide bands WR-2.2 (330 GHz - 500 GHz) and WR-1.5 (500 GHz - 750 GHz). These components extend the frequency range of the measurement equipment available at the Chair for Circuit Design and Network Theory (PSN). They are primarily used in conjunction with network analyzers (S-parameter measurements), power detectors (compression point measurements) and spectrum analyzers (spectral analysis) for measuring integrated circuits (ICs). The measuring station is configured so that all components fit seamlessly around the wafer probers on the PSN for contacting the chips. This allows the geometric dimensions of waveguides and transitions to be minimized in order to keep transmission losses low. This, together with the use of the latest generation of converter modules available on the market, results in comparatively high signal powers, which is important in order to be able to investigate the non-linear properties of the circuits. In each of the two bands the following are required: two converter modules, a waveguide calibration kit, two measuring tips with calibration substrate, a broadband receiver, two horn antennas as well as waveguide bends and transitions. The HFIC measuring station is used in the PSN measuring laboratory at the TU Dresden. Here, in particular, the circuits designed by the employees are characterized by measurements and tested with regard to their function. The test signals are fed in and out via high frequency measuring tips, which contact the ICs using a wafer prober. This measuring station expansion enables the PSN, the TUD and partners to conduct pioneering and international competitive research for circuits and systems up to the THz-range. The research topics include, among others, very fast wireless communication technologies of the future, very resource-saving optical data communications (e.g. based on plasmonic components) and high-resolution radar sensors. Until today, based on its works, the PSN has published more than 600 scientific publications and received over 50 scientific awards.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Messplatz für integrierte Hochfrequenzschaltungen bei 330-750 GHz
• Instrumentation Group: 6380 Frequenzanalysatoren, Schwingungsanalysatoren
• Applicant Institution: Technische Universität Dresden
• Leader: Professor Dr.-Ing. Frank Ellinger