Multifunctional high-performance ion beam etching and coating system

• Subject Area: Materials Engineering
• Term: Funded in 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 550450556

The Institute of Micro Production Technology contributes to strengthening quantum research and optical technologies in Germany as part of the clusters of excellence Quantum Frontiers and PhoenixD, in the Quantum Valley Lower Saxony research network and in numerous research projects. The IMPT also conducts research on microsystems in individual projects and in the SFB, TR and SPP networks. While micro-electro-mechanical systems (MEMS) dominate the market and are indispensable today, quantum systems have so far only been prototypes or very small series. Our vision is to further develop MEMS into a quantum-micro-optical-electro-mechanical system (Q-MOEMS). Relevant for this expansion is the photonic integration, i.e. the development of novel, scalable and compact processes for the realization of photonic quantum systems with the aim of chip-based photonic circuits. The device applied for makes it possible to extend this goal to include essential process chains. These include the production of layers with optical quality and with perfect electrical insulation. The system applied for allows both ion beam etching processes and ion beam coating processes (IBE and IBS). The processes can also work reactively (RIBE and RIBS). The combination of the large primary ion source and the secondary ion source enables dual ion beam sputtering (DIBS) with maximum homogeneity. Together with the absence of defects, purity and adjustable refractive index through the use of zone targets, optimally smooth and dense layers with the highest optical quality can be produced in a way that is not possible with any other process. The zone targets also allow research into alternating layer systems for optical functional layer stacks (filters), for example. The layer thickness is monitored using oscillating crystals and optical broadband monitoring. The lock chamber enables short pump-down times and no vacuum breakage. This facilitates, for example, surface pre-treatment to achieve maximum coating adhesion. Sensory (e.g. highly sensitive nano resonance transducers) and optical components (e.g. waveguides) can thus be produced without defects and with high yield and reproducibility. Particularly in the PhoenixD and QuantumFrontiers excellence initiatives, the angled process control enables the implementation of innovative concept ideas with nanoscopic 3D structures. Ion beam trimming (IBT) can be used to planarize previous coatings, which expands the manufacturing processes for diamond coatings in particular. Overall, such a system will overcome existing process limits and result in a significant increase in the previous functional scope of thin-film systems. This will make an important contribution to cutting-edge German research in quantum technology, optics and sensor technology.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Multifunktionales Hochleistungs-Ionenstrahlätz- und -beschichtungssystem
• Instrumentation Group: 5180 Elektronen- und Ionenstrahl-Quellen und -Bearbeitungsgeräte
• Applicant Institution: Gottfried Wilhelm Leibniz Universität Hannover
• Leader: Professor Dr.-Ing. Marc Christopher Wurz