Nanolithography system

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: Funded in 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 556312671

We apply for a high-performance nanolithography system (also known as "multi-photon lithography") for the additive manufacturing (also known as "two-photon polymerization") of micro- and nano-optics. The nanolithography system is to be operated in a suitable clean room at Technische Hochschule Nürnberg together with a femtosecond-laser workstation for micro- and nanostructuring of optical elements, for which we apply for in parallel. The focus of the intended research is the additive manufacturing of optical components and photonic coupling elements for subsystems of quantum computers, sensors and communication systems. The aim of this research is to miniaturize such quantum technologies by integrating micro-optical elements and developing scalable and automatable manufacturing processes. As part of the program to strengthen interdisciplinary teaching and research capacities in the field of quantum sciences and quantum technologies, a new research professorship was established at TH Nürnberg, which Prof. Andreas Stute holds as one of the main users of the requested equipment. Other main users of the requested equipment and researchers in the project "Optische Quantentechnologien" are Prof. Bernd Braun and Prof. Rainer Engelbrecht with their respective working groups and institutes. The requested equipment is also available to other researchers at TH Nürnberg. Prof. Andreas Stute's research work focuses on the development of additively manufactured micro-optics for efficient control and readout of various quantum systems from spin qubits in crystals and semiconductors (diamond, silicon carbide and III-V semiconductors) to individual atoms in ion-trap quantum processors. Prof. Bernd Braun's working group is dedicated to writing optical waveguides, photonic crystals and diffractive optical elements for laser beam shaping. Prof. Rainer Engelbrecht's institute develops micro-lenses for optical fiber in-/outcoupling, waveguides and spot-size converters for photonic integrated circuits and microstructured optical sensors. The nanolithography system that we apply for will sustainably strengthen research activities at TH Nürnberg and promote cooperation across faculty boundaries. Future research projects with academic and industrial partners will support scientific research and advance technological innovations.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Nanolithographie-System
• Instrumentation Group: 0910 Geräte für Ionenimplantation und Halbleiterdotierung
• Applicant Institution: Technische Hochschule Nürnberg Georg Simon Ohm
• Leader: Professor Dr. Andreas Stute