High-resolution, analytical scanning electron microscope

• Subject Area: Chemical Solid State and Surface Research
• Term: Funded in 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 562634091

This proposal relates to a high-resolution analytical scanning electron microscope (SEM) for characterizing nanoparticles. The key feature is the high resolution (0.5 nm), particularly with in-lens detectors and a STEM detector (STEM: scanning transmission electron microscopy). In addition, the device is characterized by a powerful energy-dispersive X-ray spectroscopy (EDXS) to perform chemical analysis with minimal radiation damage to the sample, quickly and with high spatial resolution. In particular, it should also be possible to determine light elements (C, N, O, F) qualitatively and quantitatively, which requires a windowless EDXS detector. EDXS should also be possible on single particles in the STEM mode. Since many nanoparticle samples are very sensitive to moisture and/or air (e.g. nanoparticles of base metals), the device is also equipped with a transfer system that allows the transfer of both SEM and STEM samples from a glove box to the scanning electron microscope under inert conditions. The SEM device is essential for research work on different nanoparticles and nanomaterials. These include nanoscale hollow spheres, drug nanoparticles, nanoparticles of base metals, and cluster compounds. The characterization includes particle size, particle size distribution, particle structure, and particle morphology by high-resolution imaging (SEM, STEM) as well as qualitative and quantitative chemical analysis (EDXS). In addition to the applicant as the main user, other working groups will use the proposed SEM device as secondary users. The SEM device should ultimately also ensure rapid feedback on the success of chemical synthesis for very small nanoparticles (1-5 nm) and allow a clear prioritization of which nanoparticles need to be examined via the more elaborate transmission electron microscopy.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Hochauflösendes, analytisches Rasterelektronenmikroskop
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Karlsruher Institut für Technologie
• Leader: Professor Dr. Claus Feldmann