Metal-oxide-impregnated adsorbents membrane composites: Removal of low molecular weight organics and micropollutants in water reuse for ultrapure water in semiconductor manufacturing

• Applicant: Professorin Dr. Andrea Iris Schäfer
• Subject Area: Chemical and Thermal Process Engineering
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 567047572

The production of semiconductors consumes high quantities of ultrapure water (UPW). In the thread of water scarcity, the focus on water reuse to augment water availability is of the interest of both, Korea and Germany as leaders in technological innovations in semiconductor manufacturing. Reverse osmosis (RO) is a widely used membrane process for producing the UPW due to high rejection of ions, dissolved organic matter and micropollutants. Nevertheless, RO permeate cannot meet the strict UPW water quality guidelines and this poses a challenge to the industry. When surface water is being treated with RO, the guidelines are met, which indicates that the characteristics of organic matter from in reused wastewater and surface water are different. MOREWA aims to i) characterize and identifying the low molecular weight (LMW) organics (effluent organic matter) and main micropollutants (dioxins, steroid hormones, phenols, short chain PFAS and other groups) in RO permeate that may cause the failure in meeting the UPW guidelines, ii) develop advanced adsorption materials based on mixed metal oxide-impregnated powdered activated carbon, and iii) integrate the absorbent with suitable membranes (ultra- and nanofiltration) in a continuous system. The main challenge of the project is to identify the mechanisms responsible for the adsorption of low molecular weight organics and micropollutants. Enhancing adsorption and reducing the interference of LMW pose limitations in adsorption kinetics. When designing an integrated membrane system, mass transfer – and thus apparent kinetics – can be enhanced, while adsorbents that capture LMW organics of highly diverse properties are required. Highly sensitive analytical tools such as LC-MS/MS and LC-OCD/OND will be deployed to identify the main culprits in RO permeates. The Korea-Germany collaboration is synergistic. The fabrication of advanced adsorbents is the expertise of the Korean group, while integrating adsorbents into the hybrid system with membranes is the core expertise of the German partner. Lead PIs Choo and Schäfer have long standing expertise and networks in organic matter characterization and removal. MOREWA will address the challenge of meeting extremely high water quality standards of UPW in the semiconductor industry and strives to enhance the ability of water reuse processes in making water available for semiconductor manufacturing, and ideally enable this high value water to remain in the process loop.

• DFG Programme: Research Grants
• International Connection: South Korea
• Partner Organisation: National Research Foundation of Korea, NRF
• Co-Investigator: Dr. Martyna Krajewska, Ph.D.
• Cooperation Partner: Professor Kwang-Ho Choo, Ph.D.