Project Details
Projekt
Atmospheric Pressure Plasma Reactor
Subject Area
Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
Term
Funded in 2025
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 569337067
The present proposal in the frame of the Major Research Instrumentation Programme applies for a plasma reactor system and a peripheral unit to be set up in-house to investigate the efficient, electricity-based, plasma-assisted gas conversion of waste gases from semiconductor production. Furthermore, the system will be applied for the investigation of plasma catalytic concepts. The plasma reactor is based on one or more surface dielectric barrier discharges (SDBD), and will be operated within the aforementioned periphery. The periphery consists of an aluminum profile system frame and is gas-monitored and exhausted in an upper part enclosed by acrylic glass windows. The open area below is used to accommodate the measuring devices and electrical power sources. The entire gas supply, including the plasma reactor, is set up from high vacuum technology components. The SDBD-reactor is supplied with electrical power in the form of high-voltage pulses supplied by a corresponding generator. After gas conversion in the reactor, the gas mixture is fed into a dry bed absorber. A comprehensive safety concept consisting of differential pressure measurement and gas sensors installed in the enclosed part ensures the safe operation of the system. In this way, reactive gases can be treated and extensively analyzed in the plasma reactor. In combination with a quantitative plasma characterization (with extensive diagnostic and simulation methods), electricity based and energy-efficient plasma methods for the gas conversion of semiconductor gases are to be fundamentally investigated.
DFG Programme
Major Research Instrumentation
Major Instrumentation
Atmosphärendruck-Plasmareaktor
Instrumentation Group
8310 UHV-Anlagen zur Analytik
Applicant Institution
Ruhr-Universität Bochum
