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Prerequisites and Specifications for Sub Ångström Low-Voltage Transmission Electron Microscopy (SALVE) operation for investigating nano-scale properties of beam-sensitive objects (SALVE III)

Subject Area Synthesis and Properties of Functional Materials
Term from 2009 to 2014
Project identifier Deutsche Forschungsgemeinschaft (DFG) - Project number 89210491
 
Final Report Year 2014

Final Report Abstract

We report on advances in sample preparation, imaging theory, instrumentation and application for low-voltage microscopy and spectroscopy. We developed further sample preparation for ultra-thin lamellas of classical materials (semiconductors, layered systems, ceramics, and metal oxides) by FIB techniques as well as for low-dimensional materials by graphene-sandwiches or carbon nanotube-confining. With regard to image theory we used a modified calculation approach and showed that graphene can be treated as a weak-phase object when imaged at a voltage of 80kV, but not at 20kV. As most of our samples cannot accept an infinitely high dose, a procedure for dose-dependent calculations has been developed and can now be applied to electron-beam-sensitive materials. We also considered inelastic scattering and an improved way has been developed for energy-filtered TEM image calculation based on the mutual coherence function. We carried out specification tests of the TEM instruments including the newly developed aberration corrector. However, because of the withdrawal of Zeiss from TEM development and the SALVE project, we had to concentrate on the existing (unfinished) tool and could test only a few proposed specifications. Furthermore, we successfully developed and refined calibration methods for momentum-resolved electron energy-loss spectroscopy on the SALVE I machine. With respect to developing the SALVE application field in the range of 20 to 80 kV, we focused in two different directions: we obtained new insight in the dynamics of phase transformation, defect formation and metal-carbon bond formation as well as into the structure of the amorphous phase when operating the machine at 80kV. However, when working at 20kV, we aimed to understand the pristine structure of the material.

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