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Institution
Rheinisch-Westfälische Technische Hochschule Aachen
Fakultät für Maschinenwesen
Lehrstuhl für Technologie optischer Systeme
Address
Steinbachstraße 15
52074 Aachen
Deutschland
GERiT
This institution in GERiT
52074 Aachen
Projects
Research Grants
Current projects
Theoretical and experimental investigation of precise and dynamic beam shaping for laser materials processing
(Applicant
Bonhoff, Annika
)
Uncertainties of model fits in EUV nanograting metrology
(Applicant
Brose, Sascha Manuel
)
Completed projects
Efficient and robust algorithms for the design of manufacturable optical freeform surfaces and their experimental validation
(Applicants
Dahmen, Wolfgang
;
Loosen, Peter
)
Experimental and theoretical studies of thermally induced aberrations in optical systems for laser material processing
(Applicants
Loosen, Peter
;
Poprawe, Reinhart
)
Resolution and throughput scalability limits of a compact EUV nanopatterning tool - Erkenntnistransfer-Projekt
(Applicant
Holly, Carlo
)
Spectroscopic EUV metrology for nanoscale gratings
(Applicant
Holly, Carlo
)
Theoretical and experimental investigations on pulse front deformations for laser material processing using ultra-short laser pulses
(Applicant
Loosen, Peter
)
Untersuchung zur Herstellung nanopartikulärer laseraktiver Werkstoffe für hochintegrierte diodenngepumpte Laser
(Applicants
Gottmann, Jens
;
Loosen, Peter
;
Telle, Rainer
)
Major Research Instrumentation
Completed projects
Laser-driven system for the generation of coherent extreme-ultraviolet radiation
Major Instrumentation Initiatives
Completed projects
High-throughput Alloy Development for Additive Manufacturing via 3D-Extreme High-speed Laser Material Deposition (3D-EHLA)
Clusters of Excellence
Completed projects
EXC 128: Integrative Production Technology for High-Wage Countries
(Spokesperson
Brecher, Christian
)
Additional Information
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