Detailseite
Projekt
Synthese von Nanodrähten und Nanoketten mit feinfokussierten Ionenstrahlen
Antragsteller
Dr. Bernd Schmidt
Fachliche Zuordnung
Physik der kondensierten Materie
Förderung
Förderung von 2004 bis 2007
Projektkennung
Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 5428974
The aim of the project is the fabrication of semiconducting and metallic nanowires by different methods of ion beam synthesis (IBS) using the fine-focused ion beam technology (FIB technology). Nanowires will be synthesized preferentially on silicon dioxide films and silicon substrates. For the fabrication of the nanostructures the following FIB-based methods will be applied: 1) direct FIB ion implantation of thin lines into the substrate, using FIB implantation of Si and Ge for semiconducting nanowires, and of Au and other metals for metallic nanowires. 2) FIB-assisted local deposition of Au from a precurser gas onto SiO2. The combination of an Au ion beam (instead of the common Ga beam) with an Au precurser gas leads to a high purity and therefore to a better conductivity of the nanowires. 3) FIB induced templating (local change of the surface wetting behaviour) for subsequent thin layer deposition; 4) synthesis of metallic CoSi2 nanowires (or chains of nanodots) by Co FIB ion implantation into Si. The quality and dimensions of the fabricated structures will be investigated mainly by transmission and scanning electron microscopy. Furthermore, the experimental results will be compared with predictions of theoretical modelling to get a better understanding of the processes far from thermodynamic equilibrium and, therefore, an optimisation of the IBS process based on fundamental understanding. Finally, electrical and optical measurements on functional structures will point towards the development and fabrication nanodevices.
DFG-Verfahren
Schwerpunktprogramme
