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Project Details

Institution

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KLA-Tencor Corporation

Address One Technology Drive
Milpitas CA 95035
USA

Milpitas CA 95035

Projects

Priority Programmes
- Completed projects
  - Zeitaufgelöste Beobachtung und Modellierung der Entstehung laserinduzierter Nanostrukturen
    (Applicants Ivanov, Dmitry ; Juschkin, Larissa ; Poprawe, Reinhart ; Taubner, Thomas )
Collaborative Research Centres
- Completed projects
  - Integration and nanopatterning techniques
    (Project Heads Grützmacher, Detlev ; Juschkin, Larissa )

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