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Institution
KLA-Tencor Corporation
Address
One Technology Drive
Milpitas CA 95035
USA
Milpitas CA 95035
Projects
Priority Programmes
Completed projects
Zeitaufgelöste Beobachtung und Modellierung der Entstehung laserinduzierter Nanostrukturen
(Applicants
Ivanov, Dmitry
;
Juschkin, Larissa
;
Poprawe, Reinhart
;
Taubner, Thomas
)
Collaborative Research Centres
Completed projects
Integration and nanopatterning techniques
(Project Heads
Grützmacher, Detlev
;
Juschkin, Larissa
)
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