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Project Details

Institution

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SUSS MicroTec Lithography GmbH

Address Schleissheimer Straße 90
85748 Garching
Deutschland

85748 Garching

Projects

Collaborative Research Centres
- Completed projects
  - Laser Transmission Bonding of Silicon to Silicon on Wafer-Level and Chip-to-Wafer-Level
    (Project Head Gillner, Arnold )

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