Project Details
Person
Professor Dr. Benjamin Butz
Address
Universität Siegen
Fakultät IV
Department Maschinenbau
Lehrstuhl für Mikro- und Nanoanalytik und -tomographie
Paul-Bonatz-Straße 9-11
57076 Siegen
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As Applicant
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Completed projects
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Environmental TEM for Micro- and Nanostructure Research (Research Fellowships)
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Completed projects
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As Leader
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Current projects
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Siegen Micro- and Nanoanalytics Facility MNaF (Core Facilities)
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Completed projects
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Imaging Electron Energy-Loss Spectrometer (Major Research Instrumentation)
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Analytisches Transmissionselektronenmikroskop (Major Research Instrumentation)
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Reactive RF/DC sputter deposition tool for transparent electrodes, insulators and contacts (Major Research Instrumentation)
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Reactive evaporation system for oxides and nitrides (Major Research Instrumentation)
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Evaporation system with glovebox for metals and reactive materials (Major Research Instrumentation)
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Dual-beam FIB/SEM with Ga-ion column (Ga-FIB/SEM) (Major Research Instrumentation)
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Dual-beam FIB/SEM with multi-species plasma ion column (plasma-FIB/SEM) (Major Research Instrumentation)
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Current projects
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As Participating Researcher
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Completed projects
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GRK 1896: In Situ Microscopy with Electrons, X-Rays and Scanning Probes (Research Training Groups)
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Completed projects
- As Project Head
