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Projekt Druckansicht

GRK 1322:  Energy Harvesting für Mikrosysteme

Fachliche Zuordnung Systemtechnik
Förderung Förderung von 2006 bis 2015
Projektkennung Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 13001660
 
Erstellungsjahr 2016

Zusammenfassung der Projektergebnisse

Wir leben heute in einer hochgradig vernetzten Informationsgesellschaft. Das Internet mutiert zum weltweiten drahtlosen Informationssystem und soll in Zukunft die Kommunikationsplattform für ein „Internet of Things" werden. Ebenso rasant wächst die Zahl der verteilten eingebetteten Informationssysteme in Produktionstechnik, man denke an das Schlagwort „Industrie 4.0“, Gebäudetechnik, Medizintechnik, Sicherheitstechnik oder Verkehrstechnik, ohne die unser heutiges Leben nicht mehr denkbar wäre. In all diesen Szenarien werden zunehmend Funktechniken für die Datenübertragung eingesetzt, da sie wie im „world wide web“, flexible Erweiterbarkeit und Mobilität versprechen. Die Stromversorgung der eingebetteten Sensoren erfolgt jedoch nach wie vor per Kabel oder Batterie. In Fabrikanlagen, Gebäuden und Fahrzeugen sind die Energie- und Datenkabel der verteilten Systeme mittlerweile ein signifikanter Kostenfaktor. Diese Kabelnetze sind störanfällig, schwer und teuer, sie müssen manuell verlegt, erweitert und gewartet werden. Batterien sind nur selten eine brauchbare Alternative. Aus technischer Sicht setzen Temperatur, Vibration oder Korrosion, aus ökonomischer Sicht ihre Wartung und Entsorgung enge Grenzen. Es stellt sich somit die drängende Frage, wie das Energieproblem verteilter eingebetteter Systeme angesichts ihrer wachsenden Komplexität und Verbreitung zu lösen ist. „Micro Energy Harvesting" ist das Schlagwort für ein völlig neuartiges Konzept, um verteilte Systeme - bevorzugt kleine, robuste und leistungsarme Mikrosysteme - ohne Kabel oder Batterie zuverlässig mit Energie zu versorgen. Dieses Konzept folgt im Grundsatz den Prinzipien biologischer Energiesysteme. Die benötigte elektrische Energie wird aus der unmittelbaren Umgebung des Systemknotens „geerntet“. Mechanische Energie aus Vibration, Schall oder Strömung kann beispielsweise mit piezoe-lektrischen, elektromagnetischen oder kapazitiven Generatoren gewonnen werden, Wärmeenergie mit thermoelektrischen Wandlern, Energie aus Licht mit Solarzellen und chemische Bindungsenergie mit Bio-Brennstoffzellen. Die gewonnene elektrische Energie wird in einem Speicher gesammelt und über ein intelligentes Energiemanagement so rationiert, dass der Systemknoten seine Aufgabe zuverlässig erfüllt. Das Graduiertenkolleg GRK „Micro Energy Harvesting“ hatte im Förderzeitraum 2006 - 2017 als Thema die grundlegende Erforschung, Entwicklung und Anwendung von Konzepten und Methoden zur Wandlung, Speicherung und Verteilung von Energie in autonomen Mikro­ systemen. Das Forschungsprogramm bestand über die gesamte Laufzeit aus 20 parallel ausgeschriebenen Projekten, die in enger Zusammenarbeit die Themengebiete Energiewandlung, Energiespeicherung und Energiemanagement bearbeiteten. Als neues Themengebiet trat ab 2011, in der Fortsetzungsphase, der Systemaspekt energieautarker, eingebetteter Systeme hinzu. Das Studienprogramm wurde konzipiert, um den Stipendiatinnen und Stipendiaten eine fokussierte Ausbildung auf den o.g. Gebieten zu bieten. Die Stiperidiatinnen und Stipendiaten wurden auf verschiedenen Ebenen, durch Integration in Arbeitsgruppen, durch Nachwuchswissenschaftler und Professoren und Professorinnen, umfassend betreut.

Projektbezogene Publikationen (Auswahl)

  • Elektromechanischer Energiewandler basierend auf SOI-Technologie, Proc. VDE/VDI 4. GMM-Workshop Energieautarke Sensorik, Sept. 14-15, 2006, Karlsruhe, Germany. 99-102
    U. Bartsch, A. Trautmann, P. Ruther, O. Paul
  • Innovative „Energy Harvesting“ Prinzipien zur Wandlung von kinetischer Energie, Energieautarke Sensorik - 4. GMM-Workshop 2006, Karlsruhe, Sept. 14-15, 2006, CD
    D. Spreemann, B. Folkmer, D. Maurath, Y. Manoli
  • Tunable Transducer for low frequency vibrational energy harvesting. Proc. Eurosensors 2006, Göteborg, Sept. 17-20, 2006, CD
    D. Spreemann, B. Folkmer, D. Maurath, Y. Manoli
  • Advanced numerical modelling of an electromagnetic vibration transducer Proc. PowerMEMS 2007, Freiburg, Nov. 28-29, 2007, 97-100
    D. Spreemann, D. Hoffmann, B. Folkmer, D. Maurath, Y. Manoli
  • An Autonomous Wireless Sensor Platform based on Micro Generators. PowerMEMS 2007, Freiburg. Nov. 28-29, 2007, 351-354
    D. Maurath, T. Hehn, D. Spreemann, Y. Manoli
  • Angewandtes .Micro Energy Harvesting-Systemkonzept für energieautarke Mikrosysteme, Proc. Mikro SystemTechnik Kongress 2007, October 15-17, 2007, Dresden, Germany, 797-800
    U. Bartsch, C. Bretthauer, T. Hehn, B. Mack, T. Ungan, Y. Manoli, O. Paul, L. Reindl, H. Reinecke, U. Wallrabe, P. Woias
  • Concept for Harvesting Low Ambient RF-Sources for Microsystems. Proc. PowerMEMS 2007, November 28-29, 2007, Freiburg, Germany, 293-295
    T. Ungan, L.M. Reindl
  • Design and Fabrication of a MEMS Thermoelectric Generator for Energy Harvesting, Proc. PowerMEMS 2007, November 28-29, 2007, Freiburg, Germany. 149-152
    T. Huesgen, N. Kockmann, P. Woias
  • Electrostatic Micro Energy Harvesting Devices based on SOI-Technology, Proc. MikroSystemTechnik Kongress 2007, October 15-17, 2007, Dresden, Germany, 785-788
    U. Bartsch, J. Caspar, P. Ruther, O. Paul
  • Electrostatic Transducers for Micro Energy Harvesting based on SOI-Technology, Digest of Technical Papers, IEEE Transducers 2007 & Eurosensors XXI, June 10-14, Lyon, France, 2007. 141-144
    U. Bartsch, A. Trautmann, P. Ruther, O. Paul
    (Siehe online unter https://doi.org/10.1109/SENSOR.2007.4300091)
  • Elektromechanischer Energiewandler basierend auf SOI-Technologie. Technisches Messen 74 (12), 2007, 636-641
    U. Bartsch, P. Ruther. O. Paul
    (Siehe online unter https://doi.org/10.1524/teme.2007.74.12.636)
  • Micro Energy Harvesting durch Mikro-Brennstoffeellen, Proc. Mikro System Technik-Kongress 2007, October 15-17, 2007, Dresden, Germany, 349-352
    B. Fleischhauer, A. Kloke, S. Rubenwolf, K. Schuh, C. Schlipf, M. Krüger, L. Hussein, C. Müller, O. Prucker, H. Reinecke, J. Rühe, F. von Stetten, R. Zengerle, P. Woias
  • Microstructured In-Plane Thermoelectric Generators with Optimized Heat Path, Digest of Technical Papers, IEEE Transducers 2007, June 10-14, 2007, Lyon, France, 133-136
    N. Kockmann, T. Huesgen, P. Woias
    (Siehe online unter https://doi.org/10.1109/SENSOR.2007.4300089)
  • Thermoelektrische Strukturen für wäremoptimierte Dünnschicht-Thermogeneratoren und zur Temperaturmessung, Proc. MikroSystemTechnik Kongress 2007, October 15-17, 2007, Dresden, Germany, 801-804
    N. Kockmann, C. Albers, T. Huesgen, P. Woias
  • A 0.5V Rail-to-Rail 1.5 µW CMOS Amplifier for Micro-Energy Harvesting Applications, Proc. IEEE MWSCAS, Knoxville, USA, Aug. 23-25, 2008. 189-192
    D. Maurath, F. Michel, M. Ortmanns, Y. Manoli
    (Siehe online unter https://doi.org/10.1109/MWSCAS.2008.4616814)
  • A CMOS Integrated Interface for Piezoelectric Generators, Proc. PowerMEMS 2008, Sendai, Japan, 2008, 457-460
    T. Hehn, C. Peters, F. Hagedorn, M. Ortmanns, Y. Manoli
  • A frequency tunable piezoelectric energy converter based on a cantilever beam, Proc. PowerMEMS 2006. November 09-12, 2008, Sendai, Japan. 309-312
    C. Eichhorn, F. Goldschmidtböing, P. Woias
  • A Permeable Foil-Based Thin Layer Oxygen Cathode for Biofuel Cell and Sensor Applications. Proc. 10th World Congress on Biosensors, May 14-16. 2008, Shanghai, China, P2.24
    A. Kloke, S. Kerzenmacher, U. Kräling, R. Zengerle, F. von Stetten
  • A Single Layer Biofuel Cell as Potential Coating for Implantable Low Power Devices, Proc. Eurosensors XXII, September 7-10, 2008, Dresden, Germany. W1B-4
    A. Kloke, B. Biller, S. Kerzenmacher, U. Kräling, R. Zengerle, F. von Stetten
  • Bausatz für einen modularen Miniatur-Bioreaktor und seine Anwendung als elektrochemische Testzelle für Bio-Brennstoffzellen, Tagungsband des 14. Heiligenstädter Kolloquiums, September 22-24, 2008, Heiligenstadt. Germany, 303-310
    A. Kloke, S. Rubenwolf, C. Bücking, J. Gescher, S. Kerzenmacher, R. Zengerle, F. von Stetten
  • Bausatz für Reaktoren und Reaktor, Deutsche Patentanmeldung DE 10 2008 047 920. 2008
    A. Kloke, S. Rubenwolf, S. Kerzenmacher, F. von Stetten
  • Capacitive Energy Harvesters, 5. VDI GMM Workshop Energieautarke Sensorik, Düsseldorf, Germany. November 12-13. 2008, CD
    H. Kloub, D. Hoffmann, B. Folkmer, Y. Manoli
  • Capacitive Energy Harvesters, Tagungsband zum 5. VDI-GMM Workshop Energieautarke Sensorik, November 12-13, 2008. Düsseldorf, Germany
    H. Kloub, D. Hoffmann, B. Folkmer, Y. Manoli
  • Characterization of the Charging and Long-term Performance of Cytop Electret Layers for MEMS Applications. Proc. MRS Fall Meeting 2008, December 1-5, Boston, USA. pp. 1134-BB08-17
    U. Bartsch, J. Caspar, O. Paul
    (Siehe online unter https://doi.org/10.1557/PROC-1134-BB08-17)
  • Comparison of different relative movement directions of magnet and coil in an electromagnetic energy harvester, Proc. PowerMEMS 2008, November 9-12, 2008, Sendai, Japan, 313-316
    B. Mack, M. Stürmer. U. Wallrabe
  • Design and Fabrication of a MEMS Based Metal Hydride / Air Accumulator for Energy Harvesting. International Symposium on Electrochemical Micro & Nanosystems Technologies (EMNT) 2008, Israel
    C. Bretthauer, C. Müller, H. Reinecke
  • Design and fabrication of MEMS thermoelectric generators with high temperature efficiency. Sensors and Actuators A 145-146C, 2008, 423-429
    T. Huesgen, P. Woias, N. Kockmann
    (Siehe online unter https://doi.org/10.1016/j.sna.2007.11.032)
  • Direct Electron Transfer from Adsorption-Bound Laccase to Different Carbon Based Electrodes, Proc. Tenth World Congress on Biosensors, May 14-16, 2008, Shanghai, China, P2.23
    S. Rubenwolf, A. Kloke, S. Kerzenmacher, R. Zengerle, F. von Stetten
  • Energieversorgung autarker Mikrosysteme durch Nutzung von HF-Strahlungsquellen, Proc. Ambient Assisted Living, 1. Deutscher Kongress, Technologien - Anwendungen - Management, Jan. 30 - Feb. 01,2008, Berlin, Germany, 433-435
    T. Ungan, L.M. Reindl
  • Energy Capture with Optimized Photovoltaic Cells under Low Lighting Conditions. Proc. IEEE International Conference on Green Computing and Communications (GreenCom), Nov. 20-23, 2012, Besancon, France, 628-630
    K. Rühle, L. Reindl, M. Kasemann
    (Siehe online unter https://doi.org/10.1109/GreenCom.2012.97)
  • Energy Harvesting im Ambient Assisted Living Sector, Proc. Ambient Assisted Living. 1. Deutscher Kongress, Technologien - Anwendungen - Management, Jan. 30 - Feb. 01.2008, Berlin. Germany, 209-313
    M. Müller, M. Freunek, L. M. Reindl
  • Fabrication of a Liquid-Vapor Phase-Change Actuator by Wafer-Level Adhesive Bonding. Proc. Actuator 08, June 9-11, 2008, Bremen, Germany, 770-773
    T. Huesgen, B. Albrecht, P. Woias
  • Generic Scheme for Designing an Adaptive Load Input Matching Charge Pump, Proc. PowerMEMS 2008+ microEMS2008, Dec. 01-03, 2008, Sendai, Japan, 149-152
    D. Maurath. M. Ortmanns, Y. Manoli
  • Harvesting Low Ambient RF-Sources for Autonomous Measurement Systems, Proc. IEEE International Instrumentation and Measurement Technology Conference I3MTC, May 12-15, 2008, Victoria, Canada, 145-148
    T. Ungan, L.M. Reindl
    (Siehe online unter https://doi.org/10.1109/IMTC.2008.4547005)
  • High Efficiency Low-Voltage and Self-Adjusting Charge Pump with Enhanced Impedance Matching, Proc. IEEE MWSCAS, Knoxville. USA, Aug. 23-25. 2008, 374-377
    D. Maurath, M. Ortmanns, Y. Manoli
    (Siehe online unter https://doi.org/10.1109/MWSCAS.2008.4616768)
  • Highly efficient integrated rectifier and voltage boosting circuits for energy harvesting applications, Proc. Advances in Radio Science, Miltenberg, Germany, 2008. No. 6, 219-225
    D. Maurath, C. Peters, T. Hehn, M. Ortmanns, Y. Manoli
    (Siehe online unter https://doi.org/10.5194/ars-6-219-2008)
  • Influence of Carbon Fiber Morphology on Direct Electron Transfer, Proc. 213th ECS Meeting, May 18-22, 2008, Phoenix, USA. 205
    S. Rubenwolf, O. Strohmeier, R. Zengerle, F. von Stetten
  • Konzept zur Energieversorgung autarker Mikrosysteme durch Nutzung von HF-Strahlungsquellen, Proc. Sensor und Messsysteme 2008, 14. Fachtagung, March 11-12, 2008, Ludwigsburg, 899-904
    T. Ungan, L.M. Reindl
  • Low thermal conductivity in nanoscale layered materials synthesized by the method of modulated elemental reactants. Journal of Applied Physics 104 (3), 2008, 033533
    C. Chiritescu, D.G. Cahill, C. Heideman, Q. Lin, C. Mortensen, N.T. Nguyen, D. Johnson, R. Rostek, H. Böttner
    (Siehe online unter https://doi.org/10.1063/1.2967722)
  • Low-Frequency 2D-Resonators for Vibrational Micro Energy Harvesting Applications, Proc. PowerMEMS 2008, November 9-12, Sendai, Japan, 57-60
    U. Bartsch, M. Blattmann, J. Caspar, O. Paul
  • Low-Power Electronics in Autonomous Systems, Proc. 5. VDI GMM Workshop Energieautarke Systeme, Düsseldorf. Germany. 2008, CD
    D. Maurath, C. Peters, T. Hehn, N. Lotze, M. Sherif, D. Mintenbeck, P. Becker, Y. Manoli
  • Low-Temperature Adhesive Flip-Chip Bonding Using Cytop Combined with Electrical Stud Bump Interconnects, Proc. 19th MicroMechanics Europe Workshop 2008, September 28-30, Aachen, Germany, 411-414
    U. Bartsch, T. Huesgen, J. Caspar, P. Woias, O. Paul
  • Modified model for thermoelectric generators, Proc. European Conference on Thermoelectrics, Paris, France, 2008. P1.29.1-P1.29.4
    M. Freunek, L.M. Reindl, W.D. Walker
  • Novel Ultra-Small Nanoparticies on Nanotube Buckypaper as Eiectrocatalyst for Implantable Glucose Fuel Cells, Faraday Discussion 140: Electrocatalysts - Theory and Experiment at the Interface, 07 - 09 July 2008, Southampton, UK, P028
    L. Hussein, G. A. Urban, M. Krüger
  • Photo-Crosslinked Redox Polymer Networks for Bioelectrode Applications, 214th Meeting of ECS at the Pacific Rim - Meeting on Electrochemical and Solid-State Science (PRiME) 2008. Honolulu, USA, abstract no 2843
    C. Schlipf, J. Rühe
  • Piezoelektrischer Energiewandler mit dynamisch einstellbarer Resonanzfrequenz, Deutsche Patentanmeldung DE102008056127.4-56 (Oktober 2008) und PCT-Anmeldung PCT/EP2009/007959 (November 2009)
    Ch. Eichhorn, F. Goldschmidtböing, P. Woias
  • Reductase activity of outer membrane ctype cytochromes in Shewanella oneidensis, Tagungsband zur Jahrestagung der Vereinigung für Allgemeine und Angewandte Mikrobiologie und der Gesellschaft für Biochemie und Molekularbiologie, March 9.-11. 2008, Frankfurt am Main, Germany, 91
    C. Bücking. S. Rubenwolf, F. von Stetten, J. Gescher
  • Surface Attached Polymer Networks through Thermally Induced Cross-Linking of Sulfonyl Azide Group Containing Polymers. Macromolecutes 41, 2008, 9284-9289
    K. Schuh, O. Prucker, J. Rühe
    (Siehe online unter https://doi.org/10.1021/ma801387e)
  • Surface Attached Polymer Networks through Thermally Induced Crosslinking, Proc. 235th ACS National Meeting, New Orleans, USA, 6.-10. April, 2008
    K. Schuh, O. Prucker, J. Rühe
  • Surface Attached Polymer Networks through Thermally Induced Crosslinking. DECHEMA Tagung: Chemical Nanotechnology Talks IX Bio meets Nano, Frankfurt, 3.-4. November, 2008
    K. Schuh, O. Prucker, J. Rühe
  • Surface-attached polymer networks. PMSE Preprints 98, 2008, 676-677
    K. Schuh, O. Prucker, J. Rühe
  • System design of a time-controlled broadband piezoelectric energy harvesting interface circuit, Proc. IEEE International Symposium on Circuits and Systems (ISCAS) 2015, May 24.-27. 2015. Lisbon. Portugal, 237-240
    Y. Cai, Y. Manoli
    (Siehe online unter https://doi.org/10.1109/ISCAS.2015.7168614)
  • Ultra-Small Nanoparticles Supported on MWNTs as Catalyst for Implantable Glucose Fuel Cells. Proc. 1st International Conference from Nanoparticies and Nanomaterials to Nanodevices and Nanosysfems, 16 -18 June 2008, Halkidiki Greece, 136
    L. Hussein, G. A. Urban, M. Krüger
  • Wafer-Level Dry-Film Photoresist Adhesive Bonding For 3D-MEMS Integration and Packaging, Proc. Micromechanics Europe Workshop 2008, September 28-30, 2008, Aachen, Germany. 255-258
    T. Huesgen, U. Bartsch, B. Albrecht, P. Vulto, J. Caspar, P. Woias
  • A 0.5 V 15µW 1.3MHz Temperature-Compensated PWM-Controller for Switch-Mode Converters, Proc. ASM/IEEE International Symposium on Low-Power Electronic Devices (ISLPED), San Francisco. USA. Aug. 19-21, 2009, 323-326
    D. Maurath. C. Andreou, Y. Manoli
    (Siehe online unter https://doi.org/10.1145/1594233.1594313)
  • A full wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist. Journal of Micromechanics and Microengineering 19, 2009, 077001 (5 pp)
    P. Vulto, T. Huesgen, B. Albrecht, G. Urban
    (Siehe online unter https://doi.org/10.1088/0960-1317/19/7/077001)
  • A Micro Capacitive Vibration Energy Harvester For Low Power Electronics, Proc. PowerMEMS 2009, Washington DC. USA, Dec. 1-4, 2009.165-168
    H. Kloub, D. Hoffmann, B. Folkmer, Y. Manoli
  • A Novel Assembly Method for Silicon-Based Neural Devices, IFMBE Proc. 25/IX World Congress of Medical Physics and Biomedical Engineering, Munich, Germany, 2009, 107-110
    S. Kisban, J. Kenntner, P. Janssen, R. v. Metzen, S. Herwik, U. Bartsch, T. Stieglitz, O. Paul, and P. Ruther
    (Siehe online unter https://doi.org/10.1007/978-3-642-03889-1_29)
  • A piezoelectric harvester with an integrated frequency tuning mechanism, Proc. PowerMEMS 2009, Dec. 01-04, 2009. Washington, USA, 45-48
    C. Eichhorn, F. Goldschmidtböing, Y. Porro, P. Woias
  • A Self-Adaptive Switched-Cap Voltage Converter with Load Control for Energy Harvesting. Proc. IEEE ESSCIRC. Athens, Greece, Sep. 14-18, 2009, 284-287
    D. Maurath, Y. Manoli
    (Siehe online unter https://doi.org/10.1109/ESSCIRC.2009.5325937)
  • An efficient low cost electromagnetic vibration harvester Proc. PowerMEMS 2009, December 01-04. 2009, Washington D.C., USA, 320-323
    E. Bouendeu, A. Greiner, P. J. Smith, J. G. Korvink
  • An energy-autonomous wireless temperature monitoring system powered by piezoelectric energy harvesting, Proc. PowerMEMS 2009, December 01-04, 2009, Washington. USA, 209-212
    P. Woias, M. Wischke, C. Eichhorn, B. Fuchs
  • An integrated alkaline fuel cell accumulator, Proc. Hydrogen and Fuel Cells Conference 2009, Vancouver, Canada, 2009, CD
    C. Bretthauer, C. Müller, H. Reinecke
  • Bidirectional frequency tuning of a piezoelectric energy converter based on a cantilever beam, Journal of Micromechanics and Microengineering 19 (9), 2009, 094006
    C.Eichhorn, F. Goldschmidtböing, P. Woias
    (Siehe online unter https://doi.org/10.1088/0960-1317/19/9/094006)
  • Bistabiles Schalten mit einem thermoelektrisch getriebenen thermopneumatischen Aktuator, Proc. MikroSystemTechnik Kongress 2009, October 12-14, 2009, Berlin, Germany, 801-804
    T. Huesgen, J. Ruhhammer, P. Woias
  • Bistable Switching with a Thermoelectrically Driven Thermopneumatic Actuator, Digest of Technical Papers, IEEE Transducers 2009, June 21-24, 2009, Denver, USA. 33-36
    J. Ruhhammer, T. Huesgen. P. Woias
    (Siehe online unter https://doi.org/10.1109/SENSOR.2009.5285570)
  • Closed loop wide range tunable mechanical resonator for energy harvesting systems, Journal of Micromechanics Microengineering 19. 2009, 094004 (9 pp)
    C. Peters, D. Maurath, W. Schock, F. Mezger, Y. Manoli
    (Siehe online unter https://doi.org/10.1088/0960-1317/19/9/094004)
  • CMOS-Integrated Adaptive Load Matching Interface with an Integrated Load Matching Detector, Proc. PowerMEMS 2009, Washington DC. USA, December 01-04, 2009, 217-220
    D. Maurath, Y. Manoli
  • CMOS-integrierte Wandlerschaltung zur optimierten Leistungsentnahme aus Piezogeneratoren, Proc. MikroSystemTechnik Kongress 2009, October 12-14, 2009, Berlin. Germany. 393-396
    T. Hehn, Y. Manoli
  • Decorated Nanotube Buckypaper as Electrocatalyst for Glucose Fuel Cells, Tagungsband zum Deutschen BioSensor-Sympos/um 2009, 29 March - 1 April, 2009, Freiburg, Germany, P-61
    L. Hussein, G. A. Urban, M. Krüger
  • Decorated Nanotube Buckypaper as Electrocatalyst for Glucose Fuel Cells. Digest of Technical Papers, IEEE Transducers 2009, June 21-24, 2009, Denver, USA, 2254-2257
    L. Hussein, Y. Feng, A. Habrioux, K. Servat, B. Kokoh, N. Alonso-Vante, G. Urban, M. Krüger
    (Siehe online unter https://doi.org/10.1109/SENSOR.2009.5285597)
  • Design and Analysis of a Novel MEMS-Heat Engine for Power Generation. Proc. PowerMEMS 2009, December 01-04, 2009, Washington DC. USA. 96-99
    T. Huesgen, P. Woias
  • Design and Fabrication of a MEMS Based Metal Hydride / Air Accumulator for Energy Harvesting, Electrochimica Acta 54 (25), 2009, 6094-6098
    C. Bretthauer, C. Müller, H. Reinecke
    (Siehe online unter https://doi.org/10.1016/j.electacta.2009.01.080)
  • Development of a 2D Electret-based Resonant Micro Energy Harvester, Tech. Digest IEEE MEMS '09, 2009, Sorrento, Italy, 1043-1046
    U. Bartsch, J. Caspar, O. Paul
    (Siehe online unter https://doi.org/10.1109/MEMSYS.2009.4805565)
  • Dry-film Photoresist Bonding for Fabrication of a Multi-Wafer Microvalve, Proc. WaferBond'09, December 06-08, 2009. Grenoble, France. 101-102
    T. Huesgen, N. Steinert, G. Lenk, P. Woias
  • Electrodeposited Thin-Layer Electrodes for the Use in Potentially Implantable Glucose Fuel Cells. Digest of Technical Papers, IEEE Transducers 2009, June 21-24, 2009, Denver. USA. 537-540
    A. Kloke, S. Kerzenmacher, R. Zengerle, F. von Stetten
    (Siehe online unter https://doi.org/10.1109/SENSOR.2009.5285380)
  • Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane. Digest of Technical Papers, IEEE Transducers 2009, June 22-25, 2009, Denver, USA, 1397-1400
    B. Mack, K. Kratt, M. Stürmer, R. Lausecker. U. Wallrabe
    (Siehe online unter https://doi.org/10.1109/SENSOR.2009.5285833)
  • Elektromagnetisches Wandlerarray aus 3D Mikrospulen und einer magnetischen PDMS Membran, Proc. MikroSystemTechnik Kongress 2009, October 12-14, 2009. Berlin, Germany, 598-601
    B. Mack, K. Kratt, M. Stürmer, R. Lausecker, U. Wallrabe
  • Energie-Adaptive Autonome Sensor-Clients, Proc. MikroSystemTechnik Kongress 2009, Oct. 13-14, 2009, Berlin, Germany, 242-245
    D. Maurath, M. Raimann, Y. Manoli
  • Energiesparende Elektronik für selbstversorgende autarke Systeme, Technisches Messen 76 (12), 2009, 560-567
    D. Maurath, C. Peters, T. Hehn, N. Lotze, S. A. Mohamed, Y. Manoli
    (Siehe online unter https://doi.org/10.1524/teme.2009.0985)
  • Energiesparende Elektronik für selbstversorgende autarke Systeme, Technisches Messen 76 (12), 2009, 560-567
    D. Maurath, C. Peters. T. Hehn, N. Lotze, S. A. Mohamed, Y. Manoli
    (Siehe online unter https://doi.org/10.1524/teme.2009.0985)
  • Enhancing the lifetime of laccase-based biofuel cell cathodes by sequential renewal of enzyme. Proc. 60th ISE Meeting, Beijing, China, 2009
    S. Rubenwolf, J. Kestel, S. Kerzenmacher, R. Zengerle, F. von Stetten
  • Facile Fabrication of Ultra Porous Platinum Electrodes and Their Application for Energy Harvesting Glucose Fuel Cells. Proc, 215th Meeting of the ECS. May 24-29, 2009, San Francisco. USA, 572
    A. Kloke, S. Kerzenmacher, R. Zengerle, F. von Stetten
    (Siehe online unter https://doi.org/10.1149/MA2009-01/11/572)
  • Frequenzstimmbare Generatoren zur Energiegewinnung von Umgebungsvibrationen mit variablen Vibrationsfrequenzen, Proc. Mikro System Technik Kongress 2009, October 12-14, 2009, Berlin, Germany, paper no. 59
    C. Eichhorn, F. Goldschmidtböing, P. Woias
  • Highly Efficient CMOS Integrated Interface Circuit for High Voltage Piezoelectric Generators, Proc. PowerMEMS 2009, Dec. 01-04, 2009, Washington D.C., USA, 431-434
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  • Highly Efficient Energy Extraction from Piezoelectric Generators, Procedia Chemistry, Vol. 1, Issue 1 (Proc. Eurosensors XXIII), Lausanne, Switzerland. 2009, 1451- 1454
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  • Kapazitive Energiewandler zum Aufbau Kinetischer Vibrationsgeneratoren, Technisches Messen 76 (12), 2009, 546-551
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  • Micro Energy Harvesting: Stand der Technik in Industrie und Wissenschaft, Proc. Ambient Assisted Living, 2. Deutscher Kongress, Technologien - Anwendungen - Management, Jan. 27-28. 2009, Berlin, Germany, CD
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  • Synthesis, stabilization, functionalization and DFT calculations of gold nanoparticles in fluorous phases (PTFE and ILs), Chem. Eur. Journal 15 (39), 2009 10047-10059
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  • 3D ultra-fast manufactured microcoils on polymer or metal cores, South African Institute of Electrical Engineers (SAIEE) Research Journal 101 (1). March 2010. 42-44
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  • A Novel Self-Starting MEMS-Heat Engine for Thermal Energy Harvesting, Proc. IEEE MEMS Conference 2010, Hong Kong. 2010, 1179-1182
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  • A Versatile Miniature Bioreactor and Its Application to Bioelectrochemistry Studies, Biosensors and Bioelectronics 25, 2010, 2559-2565
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  • Applications of Energy Harvesting, Proc. VDE-Kongress 2010, Nov. 08-09. 2010, Leipzig, Germany
    Y. Manoli, T. Hehn, D. Hoffmann, M. Kuhl, N. Lotze, D. Maurath, C. Moranz, D. Rossbach, D. Spreemann, A. Taschwer
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  • Autonomous piezoelectric energy harvesting system for improved energy extraction using a CMOS integrated interface circuit, Proc. PowerMEMS 2010, Nov. 30 - Dec. 3, 2010, Leuven, Belgium, 139-142
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  • Bistable Silicon Microvalve with Thermoelectrically Driven Thermopneumatic Actuator for Liquid Flow control, Proc. IEEE MEMS Conference 2010, January 24-28, 2010, Hong Kong, 1159-1162
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  • Carbon Electrodes for Direct Electron Transfer Type Laccase Cathodes Investigated by Current Density-Cathode Potential Behavior, Biosensors and Bioelectronics (2010)
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  • Design synthesis of electromagnetic vibration energy generators using variational formulation. JMEMS, 2010
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  • Enzyme-Containing Redox Polymer Networks for Biosensors and Biofuel Celts; A Photochemical Approach. Langmuir
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  • Low-Frequency Two-Dimensional Resonators for Vibration Micro Energy Harvesting, J. Micromech. Microeng. 20. 035016. 2010. 1-12
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  • Micro Energy Harvesting: Research after the first decade, Proc. VDE-Kongress 2010, November 8-9, 2010, Leipzig, Germany, paper number [FZT 3.3.1]
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  • Printed circuit board-based electromagnetic vibration harvesters in inverse configuration Sensor Devices 2010, 1st International Conference Sensor Device Technologies and Applications, Venice, Italy, 18.-25.07.2010
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  • Printed circuit board-based mechanical resonators for vibration energy harvesting Symposium on Energy Harvesting, 4th International Conference on Micro- and Nanosystems, Montreal, Canada, 15.-18.08.2010
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  • Reaction-specific Platinum Electrodes for Implantable Glucose Fuel Cells: Versatile Fabrication by Cyclic Electrodeposition, Proc. PowerMEMS 2010. November 30 - December 03, 2010, Leuven, Belgium, 73-76
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  • Stepwise and “ligand-free" nucleation, nanocrystal growth and formation of Au-NPs in ionic liquids (ILs), Chem. Common. 46, 2010, 1159-1161
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  • Synthesis and Electronic Properties of the Misfit Layer Compound [(PbSe)1.00]1[MoSe2]1, Journal of Electronic Materials 39 (9), 2010, 1476-1481
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  • Vapor Annealing as a Post-Processing Technique to Control Carrier Concentrations of Bi2Te3 Thin Films, Journal of Electronic Materials 39 (9). 2010,1981-1986
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  • A Digitally Adjusted Power Supply for Systems-on-Chip Based on CMOS Integrated Fuel Cells, Proc. PowerMEMS 2011, Nov. 15-18, 2011, Seoul, Korea. 86-89
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  • A Fully Autonomous Pulsed Synchronous Charge Extractor for High-Voltage Piezoelectric Harvesters, Proc. of the European Solid-State Circuits Conference (ESSCIRC) 2011, Helsinki, Finland, Sept.12-16, 2011, 371-374
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  • A self-sustaining micro thermomechanicpyroelectric generator. Appl. Phys. Lett. 99. 2011, 104102
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  • A self-sustaining pyroelectric energy harvester utilizing spatial thermal gradients. Digest of Technical Papers. IEEE Transducers 2011, June 05-09, 2011. Beijing, China. 657-660
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  • A smart and self-sufficient frequency tunable vibration energy harvester, J. Micromech. Microeng. 21 (10), 2011,104003 (11 pages)
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  • Brennstoffzellen-Akkumulator mit integrierter fotoaktiver Schicht zur solaren Beladung, Prec. MikroSystemTechnik Kongress 2011, Oct. 10-12, 2011, Darmstadt, Germany
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  • Electrically small planner antenna for compact electromagnetic (EM) wireless energy harvester, Proc. PowerMEMS 2011, Nov. 15-18, 2011, Seoul, Korea, 310-313
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  • Energieautarke Mikrosysteme fuer Automobile Anwendungen, Proc. MikroSystemTechnik Kongress 2011, Oct. 10-12, 2011, Darmstadt. Germany. 297-300
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    X. Li, D. Spreemann, T. Hehn, I. Kuehne, M. Thewes, A. Frey, G. Scholl, D. Wagner, Y. Manoli
  • Entwicklung eines Brennstoffzellenakkumulators zur Energieversorgung von autonomen Mikrosystemen, Proc. MikroSystemTechnik Kongress 2011, Oct. 10-12, 2011, Darmstadt, Germany, 383 - 386
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  • Fabrication and characterization of buckypaper-based nanostructured electrodes as a novel material for biofuel cell applications, Phys. Chem. Chem. Phys. 13. 2011,5831-5839
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  • Full Custom Prototypes - Chip Integrated Fuel Cells in the Analog Design Flow, Proc. CDN Live! EMEA 2011, May 3-5, 2011, Munich, Germany
    M. Kühl, C. Moranz, Y. Manoli
  • Galvanische Abscheidung von hochporösen Platin-Elektroden mit einstellbarer spezifischer Oberfläche für die implantierbare Glukose-Brennstoffzelle, Proc. MikroSystemTechnik Kongress 2011, Oct. 10-12, 2011, Darmstadt, Germany
    A. Kloke, C. Köhler, R. Zengerle, S. Kerzenmacher
  • In-plane DEAP stack actuators for optical MEMS applications, Electroactive Polymer Actuators and Devices (EAPAD) 2011, March 7-10, 2011, San Diego. California. USA, in: Proc. SPIE 7976, 2011, 79761U
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  • Influence of the swelling behavior on the electro­chemistry of redox hydrogels, Proc. European Polymer Congress 2011, Granada, Spain, June 26 - July 1, 2011, 999
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  • Micro Energy Harvesting: Research after the first decade, Proc. Sensor + Test Conference 2011, June 7-9, 2011, Nuremberg, Germany, 399-404
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  • Multifunctional ZnO-Nanowire-Based Sensor, Advanced Functional Materials 21 (22), 2011,4342-4348
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  • Performance improvement of a micro thermomechanical generator by incorporating Galinstan® micro droplet arrays, Proc. PowerMEMS 2011, Nov. 15-18, 2011, Seoul. Korea. 177-181
    S. K. T. Ravindran, M. Roulet, T. Huesgen, M. Kroener, P. Woias
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  • Photovottaically Rechargeable Fuel Cell Accumulator for Energy Self-Sufficient Microsystems, Digest of Technical Papers, IEEE Transducers 2011, June 05-09, 2011, Beijing, China. 1645-1648
    D. Hertkorn, C. Bretthauer, F. Büker, B. Herr, M. Müller, F. Paul, C. Müller, J. Haußelt, H. Reinecke
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  • Towards implantable autonomous systems: A low-power transducer platform powered by a glucose fuel cell. Proc. PowerMEMS 2011, November 15-18, 2011. Seoul, Korea, 19-22
    C. Köhler, C. Bentler, A. Kloke, J. Oudenhoven, V. Pop, B. Ophet Veld, S. Kerzenmacher
  • Using microorganisms to harvest electricity - Towards a self-regenerating enzymatic cathode, Proc. 3rd MicrobialFuelCell Conference, Leeuwaarden, Netherlands. June 5-8, 2011, 81
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  • A Fully Autonomous Integrated Interface Circuit for Piezoelectric Harvesters, IEEE Journal of Solid-State Circuits 47(9), 2012,2185-2198
    T. Hehn, F. Hagedorn, D. Maurath, D. Marinkovic, I. Kuehne, A. Frey, Y. Manoli
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  • A standalone pyroelectric harvester for thermal energy harvesting, Proc. PowerMEMS 2012, December 2-5, 2012, Atlanta. Georgia, USA. 80-83
    S. K. T. Ravindran, M. Kroener, P. Woias
  • Ambient electromagnetic wireless energy harvesting using multi­band planar antenna, Proc. 9th International Multi-Conference on Systems, Signals & Devices (SSD), March 20-23, 2012, Chemnitz, Germany
    A. Nimo, D. Grgic, L. M. Reindl
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  • Autonomous and Self-Starting Efficient Micro Energy Harvesting Interface with Adaptive MPPT, Buffer Monitoring, and Voltage Stabilization, Proc. of the European Solid-State Circuits Conference (ESSCIRC) 2012, Bordeaux, France. Sept. 17-21. 2012, 101-104
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  • Chip Micro Fuel Cells as Power Supply for Smart Microsystems, Proc. Int. Conference and Exhibition on integration Issues of Miniaturized Systems, March 21-22, 2012, Zurich, Switzerland
    D. Zimmermann, J. Becker, M. Kuhl, C. Moranz, I. Freund, C. Müller, H. Reinecke, Y. Manoli
  • CMOS-Based Force Sensor with Overload Protection and Improved Assembly Tolerance, Tech. Digest IEEE MEMS Conference 2012, Paris. France. Jan. 29-Feb 2. 2012, 543-546
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  • Correlation between the photoluminescence of CdSe nanocrystals and their performance in hybrid solar cells, 2012 MRS Spring Meeting & Exhibit, April 9-13, 2012, San Francisco, California, USA, Session G11.7
    M. Eck, S. Einwächter, Y. Yuan, F. S. Riehle, M. Krüger
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  • Designing Photovoltaic Cells for Indoor Energy Harvesting Systems, Proc. 9th International Multi-Conference on Systems, Signals & Devices (SSD), March 20-23, 2012, Chemnitz, Germany
    K. Rühle, M. Freunek, L. Reindl, M. Kasemann
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  • Determination of the Thermoelectric Figure of Merit of Doped Polysilicon Thin Films by Micromachined Test Structures, Proc. IEEE Sensors 2012, Taipei, Taiwan, Oct. 28-31,2012, 989-992
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  • Development and Fabrication of Active Microstructures for Wave Control on Airfoils, in C. Tropea, H. Bleckhom (eds.): Nature-Inspired Fluid Mechanics - Notes on Numerical Fluid Mechanics and Multidisciplinary Design, Springer, 2012, ISBN 978-3-642-28301-7. pp. 193-205
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  • Energy Harvesting and Chip Autonomy, in; B. Hoefflinger (ed.), CHIPS 2020 - A Guide to the Future of Nanoelectronics, Springer, ISBN 978-3-642-22399-0, 2012, pp. 393-421
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  • Energy Harvesting towards autonomous MRI detection. Euromar 2012, July 1-5, 2012, Dublin, Ireland, in: Proc. Intl. Soc. Mag. Reson. Med. 21, 2013, 0728
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  • Far-field passive temperature sensing up to 700°C using a dielectric resonator, Proc. IEEE International Conference on Wireless for Space and Extreme Environments (WiSEE) 2014, October 30-31, 2014, Noordwijk, The Netherlands
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  • Impedance optimization of wireless electromagnetic energy harvester for maximum output efficiency at µW input power. Active and Passive Smart Structures and Integrated Systems, March 11, 2012, San Diego, CA, USA, in: Proc. SPIE 8341, 2012, 83410W-1-83410W-14
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  • Intracortical Probe Arrays with Silicon Backbone and Microelectrodes on Thin Polyimide Wings. 42nd Annual Meeting of the Soc. for Neuroscience, New Orleans, LA, Oct. 13-17, 2012
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  • Microstructure for the Determination of the Seebeck Coefficients of Doped Poly-Si Thin-Films, 9th Europ. Conf on Thermoelectrics, Thessaloniki. Greece, Sept. 28- 30. 2011, in: AIP Proc. 1449. 2012, 413-416
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  • Approaching High Efficiency Wide Range Silicon Solar Cells, Proc. 39th IEEE Photovoltaic Specialists Conference (PVSC), June 16-21, 2013. Tampa, FL, USA, 2651-2654
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  • Direct Thermoelectric Characterization of Bismuth Telluride Nanovflres, Synthesized Via Catalytic Growth and Post-Annealing. Advanced Energy Materials 25 (2), 2013, 239-244
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  • Energy Harvesting mit einer Figur-8 Spule - in Richtung Energieautonome MRI Messung, Proc. MikroSystemTechnik-Kongress 2013, October 10-16, 2013, Aachen, Germany
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  • High Surface Nickel-based Air Electrode for Rechargeable Alkaline Meta-Air Batteries. 224th ECS Meeting, Oct. 27 - Nov. 1, 2013, San Francisco, CA, USA, in: ECS Transactions 58 (36) 69-74
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  • Impedance Matching for Broadband Piezoelectric Energy Harvesting, PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Series 476, 2013, 012083
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  • Influence of a SiN Drift Barrier on the Charge Decay in Parylene-C Electret Layers, PowerMEMS 2013, December 3-6, 2013, London. UK; Journal of Physics: Conference Series 476, 2013, 012084
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  • Neue Materialien und Konzepte für Biobrennstoffzellen, Proc. MikroSystemTechnik Kongress 2013, Oct. 14-16, 2013, Aachen, Germany, 626-629
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  • Nonresonant electromagnetic energy harvester for car-key application, PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Senes 476, 2013, 012096
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  • Photovoltaic Energy Harvesting for Smart Sensor Systems. Conference on Smart Sensors, Actuators and MEMS VI, May 17. 2013, San Diego, CA, USA, in: Proc. SPIE 8763, 2013. 87631T
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  • Physical Insight into Electromagnetic Kinetic Energy Transducers and Appropriate Energy Conditioning for Enhanced Micro Energy Harvesting, PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Series 476, 2013, 012023
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  • Piezoelectric materials for nonlinear energy harvesting generators, PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Senes 476, 2013, 012035
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  • The Influence of Emitter and Edges on the Low-level Injection Dependence of AI203-passivated lifetime samples. Proc. 28th European Photovoltaic Solar Energy Conference and Exhibition, Sept. 30-Oct. 4, 2013, Paris, France, 1627-1631
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  • Thermoelectric Characterization of Electrochemically Deposited Bi2Te3 Films Accounting for the Presence of Conductive Seed Layers, Journal of The Electrochemical Society 160 (9), 2013, D408-D416
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  • Thermoelectric Energy Harvesting System for Demonstrating Autonomous Operation of a Wireless Sensor Node Enabled by a Multipurpose Interface. PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Series 476. 2013, 012022
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  • Thermoelectric Properties Investigation of Single nanowires by utilizing a Thermoelectric Nanowire Characterization Platform, Proc. 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China. April 07-10, 2013, 738-741
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  • Thickness variation of electrochemically deposited strontium titanate films for photoeleclrochemical energy conversion, J. Appl. Phys. 114 (2), 2013, 027020
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  • Thiol functionalized reduced graphene oxide as a base material for novel graphene-nanoparticle hybrid composites. Chemical Engineering Journal, 231, 2013. 146-154
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  • Two-layer process for a micro thermoelectric cross-plane generator with electroplating and reflow soldering. Digest of Technical Papers, IEEE Transducers 2013 & Eurosensors XXVII, Barcelona, Spain, June 16-20, 2013, 486-489
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  • Variable reluctance harvester for applications in railroad monitoring, PowerMEMS 2013, December 3-6, 2013, London, UK, in: Journal of Physics: Conference Series 476, 2013, 012092
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  • An air-breathing cathode based on buckypaper electrodes with reversibly adsorbed laccase, Proc. 2nd EU-ISMET meeting, Alcala, Spain, September 3-5, 2014, 166
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  • Analytical model for nonlinear piezoelectric energy harvesting devices. Smart Materials and Structures 3, 2014, 105031
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  • Carbon Nanowalls for oxygen reduction reaction in Bio Fuel Cells. PowerMEMS 2014, December 3-6, 2013, Awaji Island, Hyogo, Japan, in: Journal of Physics: Conference Series 557, 2014, 12008
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  • CMOS-integrierte Energy Harvesting Schnittstellenschaltungen, Tagungsunterlagen des Elektronik Power Management Congress 2014, München, July 2-3, 2014, ISBN 978-3-645-50135-4, 5 Seiten
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  • Enzymatic fuel cells solely supplied with unpurified cellobiose dehydrogenase and laccase in microorganism's culture supernatants, ChemElectroChem 1, 2014, 1886-1894
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  • Improved Efficiency for Bulk Heterojunction Hybrid Solar Cells by utilizing CdSe Quantum Dot - Graphene Nanocomposites, Physical Chemistry Chemical Physics, 16, 2014, 12251-12260
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  • Influence of Various Conducting and Inorganic Dielectric Drift Barriers on the Charge Decay in Parylene-C Eiectret Layers, PowerMEMS 2014, December 3-6, 2013, Journal of Physics: Conference Series 557, 2014, 012102
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  • Investigating the effects of parasitic components on wireless RF energy harvesting, Proc. 11th International Multi-Conference on Systems, Signals & Devices (SSD), February 11-14, 2014, Barcelona, Spain, 1-6
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  • Modeling of the Electrical Properties of Bidirectional Alkaline Air Electrodes, Journal of the Electrochemical Society 161 (6), 2014, 1019-1022
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  • Modified Graphene as Electrocatalyst towards Oxygen Reduction Reaction for Fuel Cells, PowerMEMS 2014, December 3-6, 2013, Awaji Island, Hyogo, Japan, in: Journal of Physics: Conference Series 557, 2014, 012009
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  • Optical power transmission can help to build receive coils without coaxial cables, ISMRM-ESMRMB Annual Meeting 2014, May 10-16, 2014, Milan, Italy, in: Proc. Inti. Soc. Mag. Reson. Med. 22, 2014,1277
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  • Polymer-Nanocrystal Hybrid Solar Cells, chapter 6 in C. Brabec, U. Scherf, V. Dyakonov (eds.). Organic Photovoltaics: Materials, Device Physics, and Manufacturing, Wiley VCH Weinheim, Germany, ISBN 978-3-527-33225-0, 2nd ed. 2014. pp. 171-207
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  • Using crude culture supernatant of Escherichia coli to supply copperefflux oxidase at a biofuel cell cathode. Proc. 14th ISE topical meeting, Nanjing, China, March 29 - April 1, 2014, 42
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  • Wireless Anti-Theft Alarm System for Automobiles Based on Thermoelectric Energy Harvesting Powered Glass Break Detection, Proc. GMM-Workshop 2014 “Energy self-sufficient Sensors“, Magdeburg, Feb. 24-25, 2014,1-4
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