Eigenschaften funktionaler Strukturen auf der Nanoskala, hergestellt durch elektronenstrahlgestützte Verfahren.

• Antragsteller: Professor Dr.-Ing. Sergej Fatikow
• Fachliche Zuordnung: Elektronische Halbleiter, Bauelemente und Schaltungen, Integrierte Systeme, Sensorik, Theoretische Elektrotechnik
• Förderung: Förderung von 2010 bis 2015
• Projektkennung: Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 170948727

• Erstellungsjahr: 2014

Zusammenfassung der Projektergebnisse

The overall results of the project has shown, that controlling all EBiD-process parameters by analyzing the residual gas environment using mass spectroscopy and improving the entire process by plasma cleaning the entire vacuum chamber is a barely feasible and hence controllable undertaking for conventional SEM chambers. This result indicate the need of tailored vacuum chambers and gas-feeding and flow systems for further research work on this approach for improved EBID-processes. The novel approach of density measurements for EBID structures allowed an increased accuracy of the mechanical property determination of these structures. This led to a measurement technique, accurate enough to measure small changes in the EBiD properties with great significance. This method allows for the first time the individual characterization of mechanical (density and Youngs Modulus), morphological and chemical properties on the same structure. In conclusion, new multi-parameter descriptions and dependences of the EBiD-process and result are derived and validated. Fundamental scientific findings on the other hand, have not been achieved during this ambitious project. Even though, all known facts and figures of merit given by literature could be reproduced during the experiments. This emphasized the industrial relevance of this technique especially for sensor applications.

Projektbezogene Publikationen (Auswahl)

• "Assembly automation on the nanoscale", CIRP Journal of Manufacturing Science and Technology. 4. May 2011
  T. Wich, C. Stolle, T. Luttermann, S. Fatikow
  (Siehe online unter https://dx.doi.org/10.1016/j.cirpj.2011.03.003)
• Development of a nanoscale strain sensor with electron beam induced deposition, Proceedings of the 4M Conference 2010, Bourg‐en‐Bresse and Oyonnax, France, 17.‐19. November 2010, pp. 203‐206
  T. Luttermann, S. Fatikow
  
• Localized surface activated bonding of nano scale objects, 4M2011, 08‐10 November 2011, Stuttgart, Germany
  T. Luttermann, T. Wich, M. Mikczinski
  
• Robotic assisted mechanical characterization of Nanopillars grown by electron‐beam‐induced deposition, Proceedings of the 4th International Conference on Nanomanufacturing 2014, 8 – 10 July, 2014, Germany
  W. Hamad, S. Fatikow