Combination of micro-engineered sensors, plasma diagnostics and combinatorial methods for the development of extended structure zone diagrams (C02)

• Subject Area: Synthesis and Properties of Functional Materials
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

Combinatorial material science methods are applied to develop extended structure zone diagrams for TM-Al-O-N (TM = Cr, V, Ti) materials systems, that show correlations between plasma properties and thin film properties. The targeted manipulation of plasma properties by adjustment of process parameters (pressure, power density, frequency, target-substrate-distance) leads to different growth modes during film growth. Different growth modes and their influence on thin film properties are investigated and the results are combined into material specific structure zone diagrams with extended information about plasma- and materials properties.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Head: Professor Dr.-Ing. Alfred Ludwig