Surface processes during the interaction of high performance plasmas with HPPMS target surfaces and plastics (C07)

• Subject Area: Polymer Materials
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

By means of a particle beam experiment, surface processes of energetic metal ions, which are important for HPPMS processes at the target as well as at the substrate, are investigated. These are secondary electron production, reactive sputtering at the target as well as film formation on the substrate. The particle beam experiment is also used to evaluate the interaction of ions and UV photons with barriers and membranes on plastics. The lateral transport of metal atoms to HPPMS targets is investigated by an in-vacuo coupling of an XPS system and an HPPMS plasma.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Major Instrumentation: Ionenstrahlquelle
• Instrumentation Group: 8380 Schichtdickenmeßgeräte, Verdampfungs- und Steuergeräte (für Vakuumbedampfung, außer 833)
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Privatdozentin Dr. Teresa de los Arcos, from 7/2014 until 6/2018; Professor Dr. Achim von Keudell