NEMS based diamond field emitters for new generation of low loss RF switches
Final Report Abstract
The main aim of the RF-CUBE project - validation of new actuation and transmission principles for the ac “non-contact” transducers based on flexural vibrations of AlN/NCD resonators - has been successfully accomplished by demonstrating functionality of the field emission based device at sub-MHz frequencies. Moreover, the ideas presented in “Vision” section of the proposal have been as well partly realized using nano-fabrication methods and comprehensive processing technologies in collaboration with our scientific partners. The following topics have received a particular attention and been studied in details: • thin film deposition technologies for high mechanical quality nanodiamond/AlN heterostructures, including stress-management solutions; • studies of mechanical and (piezo)-electrical properties p-NCD and AlN layers in unimorph structures; • down-scaling of resonators down to sub-µm level in order to achieve 1 GHz for flexural vibrations and development of nano-gap technologies; • demonstration of the field emission transconductance for electrostatically coupled cantilever devices; • experimental studies of dominant field-emission mechanisms in these devices. The performed investigations have built a solid basis as for the application-related (e.g. PMUT and VME devices) as well as for the future material and device physics related studies of electro-mechanical and vacuum micro-electronic phenomena observed during RF-CUBE research. Despite of the fact that photon-assisted field emission has not been demonstrated for high frequencies as planned initially, the investigations on this particular subject will be continued further due to the high-potential of this modulation mechanism in high frequency transducers and optical sensors.
Publications
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Electrostatically coupled vibration modes in unimorph complementary microcantilevers, Appl. Phys. Lett. 100, 124104 (2012)
Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R. E.; Pletschen, W.; Raynor, B.; Polyakov, V.; Cimalla, V. & Ambacher, O.
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Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films, Nanotechnology 24, 025601 (2013)
Hees, J.; Heidrich, N.; Pletschen, W.; Sah, R. E.; Wolfer, M.; Williams, O. A.; Lebedev, V.; Nebel, C. E. & Ambacher, O.
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Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations, Sensors and Actuators A: Physical 195, 32-37 (2013)
Heidrich, Nicola; Knöbber, Fabian; Polyakov, Vladimir; Cimalla, Volker; Pletschen, Wilfried; Sah, Ram Ekwal; Kirste, Lutz; Leopold, Steffen; Hampl, Stefan; Ambacher, Oliver & Lebedev, Vadim
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Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations, Sensors and Actuators A: Physical 195, 32-37 (2013)
Heidrich, Nicola; Knöbber, Fabian; Polyakov, Vladimir; Cimalla, Volker; Pletschen, Wilfried; Sah, Ram Ekwal; Kirste, Lutz; Leopold, Steffen; Hampl, Stefan; Ambacher, Oliver & Lebedev, Vadim
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Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems, ECS Journal of Solid State Science and Technology 2 (2013) P180-P184
Sah, R. E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V. & Ambacher, O.
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Enhanced mechanical performance of AlN/nanodiamond micro-resonators, J. Micromech. Microeng. 23, 125017 (2013)
Heidrich, N.; Iankov, D.; Hees, J.; Pletschen, W.; Sah, R. E.; Kirste, L.; Zuerbig, V.; Nebel, C.; Ambacher, O. & Lebedev, V.
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Nano-diamond vacuum MEMS for RF applications, Proc. The 17th International Conference on Transducers & Eurosensors XXVII, Barcelona, SPAIN, 16-20 June 2013, pp. 218-221
Heidrich, N.; Hees, J.; Zuerbig, V.; Iankov, D.; Pletschen, W.; Sah, R. E.; Raynor, B.; Kirste, L.; Nebel, C. E.; Ambacher, O. & Lebedev, V.
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Piezoelectrically actuated diamond cantilevers for high-frequency applications, Diamond and Related Materials 38, 69-72 (2013)
Heidrich, N.; Zuerbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O. & Lebedev, V.
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Transparent diamond electrodes for tunable micro-optical devices, Diamond and Related Materials 38 (2013) 101–103
Zuerbig, V.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Nebel, C.E.; Ambacher, O. & Lebedev, V.
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Nano-diamond based spheres for radio frequency electromechanical resonators, J. Micromech. Microeng. 24, 045015 (2014)
Lebedev, V.; Iankov, D.; Heidrich, N.; Zuerbig, V.; Wild, C.; Cimalla, V. & Ambacher, O.
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Processing of nanoscale gaps for boron-doped nanocrystalline diamond based MEMS, Procedia Engineering 87, 903 – 906 (2014)
Iankov, Dimitre; Zuerbig, Verena; Pletschen, Wilfried; Giese, Christian; Iannucci, Robert; Ambacher, Oliver & Lebedev, Vadim
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Appropriate Salt Concentration of Nanodiamond Colloids for Electrostatic Self-Assembly Seeding of Monosized Individual Diamond Nanoparticles on Silicon Dioxide Surfaces, Langmuir 31, 5319–5325 (2015)
Yoshikawa, Taro; Zuerbig, Verena; Gao, Fang; Hoffmann, René; Nebel, Christoph E.; Ambacher, Oliver & Lebedev, Vadim
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“Kontaktlose Mikroschalter auf der Basis von Dünnschichten aus Aluminiumnitrid und nanokristallinem Diamant“ (2015)
N. Heidrich
