Remote Laboratory for Optical Micro Metrology

• Applicant: Professor Dr. Wolfgang Osten
• Subject Area: Microsystems
• Term: from 2012 to 2015
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 223883488

• Final Report Year: 2016

Final Report Abstract

The aim of this project was to develop novel approaches for optical micro metrology. These techniques play a prominent role in the actual research and their importance will increase in the near future. This was a joint project where the partners (Institut für Technische Optik (ITO), University Stuttgart and Institute of Optoelectronics (IOE), Shenzhen University, China) develop complementary techniques. The work at ITO was focused on the development of a multi-task optical metrology system based on the digital holographic microscopy with special attention to the measurement of shape, deformations and refractive index of micro samples. IOE developed an optical metrology system based on the phase-aided active stereo with special attention to 3D imaging and shape measurement. Remote Laboratories are used to connect the experiments developed by the partners. The funding for personnel at ITO is provided by the DFG. The Sino-German Center provides for both partners funding for small equipment, consumables, travels, hosting and publications. As planned, there were quite many personal interactions with our Chinese partners. Here is a list of the results achieved:  The remote control was implemented and communication tests between Stuttgart and University of Shenzhen were carried out successfully. The setups developed at ITO and IOE may be connected to the remote laboratory system and can be accessed (after authentication) via internet. A laboratory system for the measurement of 3D deformations of microscopic samples with accuracies of ± 9.5 nm was developed at ITO.  The laboratory setup can also measure the shape of the sample with an accuracy of ± 1 µm. A laboratory system based on multi-view configuration for the measurement of the shape of microscopic samples with accuracies was implemented. The advantages of the developed setup are: more precise 3D reconstruction, reduced shadow area, extended measurable depth range. Both partners strongly benefit from the joint work done in the frame of this project and from the fruitful cooperation plan submitting a proposal to the Chinese German Center. The topics of this new proposal are closely related with the work done in the frame of this project.

Publications

• “Remote laboratories for optical metrology: from the lab to the cloud”, Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130H (September 11, 2012)
  W. Osten, M. Wilke, G. Pedrini
  
• Remote laboratories for optical metrology: from the lab to the cloud. Opt. Eng. 52(10):101914-101914
  W. Osten, M. Wilke, G. Pedrini
  
• “Fringe projection based quantitative 3D microscopy”. Optik - International Journal for Light and Electron Optics. 2013, 124(21): 5052-5056
  A. Li, X. Peng, Y. Yin, X. Liu, Q. Zhao, K. Körner, W. Osten
  
• "Recent advances in digital holography" Appl. Opt. 53, G44-G63 (2014)
  W. Osten, A. Faridian, P. Gao, K. Körner, D. Naik, G. Pedrini, A. K. Singh, M. Takeda, M. Wilke
  
• “Phase retrieval for optical metrology”, Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927602 (November 13, 2014)
  G. Pedrini, A. Faridian, A. K. Singh, W. Osten
  
• “Nano-scale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion”; Optical Engineering, 55(12), 121722 (2016)
  A. K. Singh, G. Pedrini, X. Peng, W. Osten