Core facility Micro-Nano-Integration

• Applicants: Professor Dr.-Ing. Martin Hoffmann; Professor Dr.-Ing. Jens Müller; Professor Dr. Peter Schaaf
• Subject Area: Microsystems
• Term: from 2013 to 2018
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 233759584

The aim of the project is to establish a micro-nano-integration core facility. On the one hand this concept supports researchers to integrate (foreign) nano structures with new functions into their own micro systems and devices or on the other hand to implement their new nano structures into existing micro systems. Through appropriate structures and optimized organization of the available technologies, a wider user group at the TU Ilmenau and additional external users can get access to core facility technologies, the combined interdisciplinary expertise becomes optimally utilized and the professionalism of the operation and research will be improved. The focus is on developing a professional scientific management to operate the core facility efficiently. Instead of individual processes, process and technology chains will be made available for users which lead to a better utilization of the infrastructure. For this purposes transparent proposal, decision-making and accounting structures will be established to allow more users the access to technology. These measures ensure reproducibility of the processes along defined process-lines in addition to aspects of funding-compliant cost allocation and the necessary confidentiality.

• DFG Programme: Core Facilities