Batch fabricated SiC micro milling tools for precision machining of copper-based materials

• Applicants: Professor Dr.-Ing. Berend Denkena; Professor Dr.-Ing. Lutz Rissing
• Subject Area: Production Automation and Assembly Technology ; Synthesis and Properties of Functional Materials ; Microsystems ; Metal-Cutting and Abrasive Manufacturing Engineering
• Term: from 2013 to 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 246140520

Within this project both, the mechanical manufacturing processes as well the combination of lithography and etch processes will be developed and fundamentally investigated for allowing economical batch production of micro milling tools made of silicon carbide. Especially the combination of lithography and etching processes will enable the manufacturing of large quantities of micro milling tools in simultaneous single steps (batch process). The micro cutters at the beginning of the project will be produced using mechanical processing steps (dicing strategies) to allow the first analyses of the impact of different geometry details on the cutting behavior (result). The geometry of these first demonstrator tools will be designed under consideration of the manufacturability by an aimed batch process. Cutting quality and tool wear behavior will be characterized using iterative tests on two copper materials. The acquired research findings are incorporated into the development steps of the later batch manufacturing. The micro milling tools produced by combining the lithographic and etching methods are then characterized in the same manner as the mechanically manufactured tools regarding their cutting behavior and wear, and further optimized in several iterative steps. Based on this research, it should be made possible to produce SiC micro tools in large quantities using a batch process, qualifying this promising material for micro milling tooling.

• DFG Programme: Research Grants