Heavy particle processes in high power plasmas (C08)

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: from 2014 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

Based on the models developed for the heavy particle transport in high power plasmas in the second funding period, this subproject is now dedicated to a consistent and continuous description of heavy particle processes taking into account the inherent surface interactions and their feedback (i.e., from the target via the transport toward the substrate). Two complementary approaches are pursued: i) The present model of the gas phase is extended in terms of reactive processes; ii) The plasma – surface interaction (up to Ti-Al-O-N) is self-consistently investigated using classical molecular dynamics and coupled back to the model of the gas phase. Together with experimental results this allows for a unified, synergetic process investigation.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Professor Dr.-Ing. Thomas Mussenbrock; Professor Dr.-Ing. Jan Trieschmann, since 7/2018