New and Novel Superhard Coatings Prepared by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapour Deposition

• Antragsteller: Professor Dr. Xin Jiang
• Fachliche Zuordnung: Mechanische Eigenschaften von metallischen Werkstoffen und ihre mikrostrukturellen Ursachen
• Förderung: Förderung von 2006 bis 2009
• Projektkennung: Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 28034789

The search for new superhard materials with novel properties is important not only for an understanding of the science and technology of these materials but also for evaluating the full potential of their applications. As a result of covalent bonding, the four elements boron (B), silicon (Si), carbon (C), nitrogen (N) and/or probably oxygen (O) can form superhard materials. In the last decade, much effort has concentrated on binary and ternary components. The preliminary investigations lead one to believe that the Si¿B¿C¿N quanternary system may give opportunity to the creation of new type of superhard materials by using the advanced technique operating at the extreme preparation conditions.In this proposal, following the successful synthesis of diamond, cBN thin films and nanostrutured superhard diamond/ß-SiC composite films in the past few years, we make an attempt to synthesize new type of superhard coatings from the Si-B-C-N-(O) system by electron-cyclotron-resonance microwave plasma assisted chemical vapour deposition (ECRMWCVD). The growth mechanism of the new material, the role of carbon, nitrogen, hydrogen and oxygen, the crystal structure as well as the properties of the deposited films will be investigated systematically.

• DFG-Verfahren: Sachbeihilfen