MEMS magnetoelectric sensor fabrication (Z01)

• Subject Area: Synthesis and Properties of Functional Materials
• Term: since 2016
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 286471992

Service project Z1 focuses on the MEMS fabrication of magnetoelectric sensors to provide fully and partially processed sensors for the realization of the CRC’s scientific work program. To achieve this objective, Z1 maintains a cross-institutional technology platform consisting of separate process modules and full fabrication flows. Performing process integration as a main task, this technology platform is continuously updated to the newest concepts and findings in the CRC.

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 1261: Magnetoelectric Sensors: From Composite Materials to Biomagnetic Diagnostics
• Applicant Institution: Christian-Albrechts-Universität zu Kiel
• Co-Applicant Institution: Fraunhofer-Institut für Siliziumtechnologie (ISIT)
• Project Heads: Dr. Fabian Lofink, from 3/2023 until 6/2024; Dr. Dirk Meyners; Dr.-Ing. Florian Niekiel, from 7/2020 until 2/2023