Local confined laser-induced plasmas for direct writing of low damage patterns by precise reactive etching

• Applicant: Dr.-Ing. Klaus Zimmer
• Subject Area: Synthesis and Properties of Functional Materials
• Term: from 2018 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 392226212

• Final Report Year: 2023

No abstract available

Publications

• "Laser-induced reactive microplasma for etching of fused silica," Applied Physics a-Materials Science & Processing 126 (11), 9 (2020)
  Ehrhardt, Martin; Lorenz, Pierre; Han, Bing & Zimmer, Klaus
  
• "Dry Etching of Germanium with Laser-Induced Reactive Micro Plasma," Lasers in Manufacturing and Materials Processing (2021)
  Ehrhardt, Martin; Lorenz, Pierre; Bauer, Jens; Heinke, Robert; Hossain, Mohammad Afaque; Han, Bing & Zimmer, Klaus
  
• "Dry etching of monocrystalline silicon using a laserinduced reactive micro plasma," Applied Surface Science Advances 6, 100169 (2021)
  Heinke, Robert; Ehrhardt, Martin; Lorenz, Pierre & Zimmer, Klaus
  
• "Dynamics and 2D temperature distribution of plasma obtained by femtosecond laser-induced breakdown," J. Phys. D 55 (12), 125204 (2021)
  Hossain, Afaque M; Ehrhardt, Martin; Rudolph, Martin; Kalanov, Dmitry; Lorenz, Pierre; Zimmer, Klaus & Anders, André
  
• "Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas," Ceramics International (2021)
  Zimmer, Klaus; Ehrhardt, Martin; Lorenz, Pierre; Wang, Xi; Wang, Pingping & Sun, Shufeng
  
• "Low surface damage laser processing of silicon by laserinduced plasma etching (LIPE)," Appl. Surf. Sci. 597, 153712 (2022)
  Heinke, Robert; Ehrhardt, Martin; Bauer, Jens; Lotnyk, Andriy; Lorenz, Pierre; Morgenstern, Roy; Lampke, Thomas; Arnold, Thomas & Zimmer, Klaus
  
• "Ultrahigh Precision Machining of Polymer Surface using Laser-Induced Reactive Micro-Plasmas," J. Laser Micro/Nanoeng. 17 (1), 28-34 (2022)
  Leon Streisel, Martin Ehrhardt, Pierre Lorenz et al.
  
• Time- and Position- Dependent Breakdown Volume Calculations to Explain Experimentally Observed Femtosecond Laser- Induced Plasma Properties, ACS Photonics (2023)
  Hossain, Afaque M.; Ehrhardt, Martin; Rudolph, Martin; Lorenz, Pierre; Kalanov, Dmitry; Zimmer, Klaus & Anders, André
  
• Ultraprecise surface processing by etching with laser-induced plasmas, in: R. Stoian, J. Bonse (Eds.) Ultrafast Laser Nanostructuring, Springer Cham, ISBN: 978-3-031-14751-7, 2023, pp. XXI, 1220
  Ehrhardt, Martin; Lorenz, Pierre & Zimmer, Klaus