Interferometric testing of aspheres using gracing incidence
Final Report Abstract
Aspheric surfaces are increasingly used in modern optical systems since an improvement of the imaging quality is possible with a simultaneous reduction of the number of optical surfaces. In order to reduce the production costs the surface deviations of the aspherical surfaces should be measured before polishing in order to can directly correct the surfaces. So, the measurement of rough aspherical surfaces with high accuracy is necessary and therefore interferometric tests with perpendicular incidence of light in the visible range cannot be used. However, in grazing incidence also rough surfaces can be measured in the visible wavelength range and the aspheres can also be arbitrarily steep. But, a disadvantage of this method is that only a small meridional curve of the asphere can be measured at once. Therefore, many meridional curves with the asphere rotated around its symmetry axis are necessary to achieve a full surface measurement. In this project such a method has been developed and especially the adjustment of the meridional curves with respect to each other and their stitching have been investigated.
Publications
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Grazing incidence interferometry for testing rough asperics. SPIE Optical Metrology, Munich, Germany (2019)
S. Rothau, K. Mantel, J. Schwider & N. Lindlein
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Interferometric grazing incidence test of rough steep convex spherical and aspherical surfaces: first simulations and experimental proof of principle. Applied Optics, 58(33), 9082.
Rothau, S.; Lindlein, N. & Schwider, J.
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Interferometrie in streifender Inzidenz: Simulationen und Ergebnisse. 120. Annual Meeting of the DGaO, Darmstadt, P4, (2019)
S. Rothau, K. Mantel, J. Schwider & N. Lindlein
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Vermessung konvexer, rauer Asphären mittels Interferometrie in streifender Inzidenz. 120. Annual Meeting of the DGaO, Darmstadt, B28, (2019)
S. Rothau, K. Mantel, J. Schwider & N. Lindlein
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Interferometric grazing incidence test of rough steep convex spherics: experimental data analysis. Applied Optics, 60(1), 52.
Rothau, S.; Mantel, K. & Lindlein, N.
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Grazing incidence interferometry for testing rough aspherics. Frontiers in Optics, Washington DC, JTh5A.93, (2021)
S. Rothau, T. Schamburek & N. Lindlein
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Interferometrie in streifender Inzidenz an Asphären. 122. Annual Meeting of the DGaO, Bremen, B21, (2021)
S. Rothau, T. Schamburek & N. Lindlein
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Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object. Applied Optics, 61(15), 4246.
Rothau, S.; Schamburek, T.; Mantel, K. & Lindlein, N.
