Multiphoton lithography machine

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: Funded in 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 418911744

The Institute of Applied Optics (ITO) has been conducting research in the fields of holography, diffractive optics, nanotechnology, high-resolution measurement technology and simulation for decades. In recent years, in cooperation with the 4th Physics Institute, much-noticed results have been achieved in the field of 3D-printed complex microoptics. The proposed multiphoton lithography device is intended to expand research in the above-mentioned areas and provide the basis for opening up further fields of research with high scientific and technological perspectives. Concretely is planned:1.) The generation of high-resolution computer-generated volume holograms for the implementation of completely new optical system solutions in the fields of AR, VR, MR, as well as fiber optics and endoscopy.2.) Large-area diffractive elements with complex three-dimensional fine structures and use of the lithography system for the generation of extended meta-surfaces.3) 3D printing of complex multi-lens micro-imaging optics, which are extended to active zoom or pan systems.The device fits ideally into the existing equipment landscape funded by the DFG and BMBF. Especially the equipment for the production of diffractive elements and metallic nanostructures is usefully supplemented. In addition, high-quality equipment is available for measuring the structures.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Gerät zur Mehrphotonen-Lithografie
• Instrumentation Group: 0910 Geräte für Ionenimplantation und Halbleiterdotierung
• Applicant Institution: Universität Stuttgart
• Leader: Professor Dr. Alois Herkommer, since 10/2018