Force-sensitive rail guide systems based on directly-deposited component-individual sensors
Synthesis and Properties of Functional Materials
Microsystems
Production Automation and Assembly Technology
Final Report Abstract
Forces are an important source of information for process and condition monitoring in machine tools. The measurement of forces using structurally integrated sensors offers the advantage that there are no restrictions on the working space and rigidity of the machine. The use of structurally integrated sensors in standard components offers great potential both for new designs and for integration into existing machine designs. Guide carriages of linear guides are particularly suitable here, as they are functionally located in the force flow between the tool/workpiece contact and the machine bed. In order to fulfil the requirements placed on guide systems in machine tools, the carriages are highly rigid components on which only small strains occur. Therefore, a high sensitivity is required for the strain gauges used. Directly deposited sensors (strain and temperature) were therefore used in this project. However, the manufacturing process for these sensors is not yet suitable for industrial use. Together with the application partners, thin-film sensor technology and intelligent signal processing were developed as part of this project, which enables force measurement integrated into the carriages of profile rail guides. In order to increase the industrial applicability of directly deposited sensors, the Institute of Microproduction Technology (IMPT) researched a process chain for the direct deposition of strain gauges including temperature sensors. Sensitivity was increased by using customized sensor layouts and materials and dispensing with conventional adhesive and carrier film intermediate layers. Chrome full-bridge strain gauges were developed, applied to the guide carriage and analyzed. The IFW researched a method for automated, simulation-based sensor positioning for this purpose. In addition, the guide carriages were analyzed in use, individually and in a combination of four guide carriages. The focus here was particularly on the interference signals that occur, e.g. due to rolling element circulation and constraining forces between the guide rails. The following properties were achieved: The direct-deposited strain gauges exhibit an uncertainty of 20 nm/m with regard to the measured strain. This corresponds to a measurement uncertainty of ±250 N for the guide carriages analyzed. Decentralized data pre-processing with model-based sensor fusion and signal processing enables the use of four sensor guide carriages in the carriage network and results in a dynamic force resolution of σF ±2,000 N. The root mean square error (RMSE) of the carriage system under changing external loads was reduced from ±3,000 N to ±800 N using a least squares approach to calibration.
Publications
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Werkzeugmaschinen werden intelligent, VDI-Z, 2021
M. Klaproth, B. Denkena, B. Bergmann, R. Ottermann, F. Dencker & M.C. Wurz
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In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges. 2022 IEEE Sensors, 1-4. IEEE.
Ottermann, Rico; Zhang, Shuowen; Denkena, Berend; Klemme, Heinrich; Kowalke, Dennis; Korbacher, Michael; Dencker, Folke & Wurz, Marc Christopher
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Force sensing linear rolling guides based on modified metal strain gauges, euspen’s 23rd International Conference & Exhibition, Copenhagen, Denmark, 2023, pp. 1-2
B. Denkena, H. Klemme, D. Kowalke, M. Korbacher, R. Ottermann, F. Dencker & M.C. Wurz
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Sensoren richtig positioniert, Konstruktion und Entwicklung (6/23, 30. Jahrgang)
B. Denkena, H. Klemme, D. Kowalke, M.C. Wurz, R. Ottermann, M. Korbacher & M. Müller
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Compensation of strain gauge signal changes due to position-based internal changes in sensory linear guides. 20th International Conference on Precision Engineering, Sendai, Japan, 2024
B. Denkena, H. Buhl, D. Kowalke, R. Ottermann & M. C. Wurz
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Directly Deposited Thin-Film Strain Gauges for Force Measurement at Guide Carriages. IEEE Sensors Journal, 24(24), 40471-40484.
Ottermann, Rico; Kowalke, Dennis; Denkena, Berend; Korbacher, Michael; Müller, Matthias & Christopher Wurz, Marc
