Semi-automatic wafer probe station

• Subject Area: Production Technology
• Term: Funded in 2020
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 450639102

Semi-automatic wafer probe stations are the state-of-the-art tool for current-voltage characterization (IV-curves) and capacitance-voltage profiling (CV-curves) of semiconductor sensors and the measurement of their properties. They do not only allow a very high throughput, but also achieve very precise temperature and environmental control at low temperatures necessary for many applications in semiconductor research. The probe station requested will be used by the two experimental particle physics groups of the TU Dortmund University.The working group of Prof. Kröninger is involved in research projects in experimental particle physics and medical physics with the aim to create synergies between these two fields. Current research projects for which such a wafer probe station is crucial include the study of the sensor design and the development of quality control measures for the new ATLAS ITk pixel detector as well as research and development of radiation-hard silicon sensors for future experiments. In the realm of medical physics, the wafer probe station is necessary for the study of semiconductor detectors for proton therapy, the development of a proton radiography system as well as for electronic dosimetry with silicon sensors. The working group of Prof. Albrecht is involved in the LHCb experiment and will use the wafer probe station for the development of a beam condition monitor as well as research and development for semiconductor-based tracking detectors for future experiments, including LHCb upgrade II.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Halbautomatischer Wafer-Messplatz
• Instrumentation Group: 2780 Spezielle Meß- und Prüfgeräte für Halbleiter und Röhren (außer 620-659)
• Applicant Institution: Technische Universität Dortmund
• Leader: Professor Dr. Kevin Kröninger