Laser Nanofabrication System

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: Funded in 2020
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 453680881

We propose a Laser Nanofabrication System based on two-photon polymerization (TPP) as one of three main components of a modular Nanoproduction Facility. The system is required for the realization of 2D, 2.5D, and 3D micro- and nanostructures with high fabrication accuracy, high resolution, ultimately below the diffraction limit, and essentially without geometrical limitations. A digital holographic microscope integrated into the TPP system will complement the TPP system. It will enable real-time monitoring of the fabrication process and in-line characterization of the structures created. This will also allow to establish a feedforward loop of the TPP production flow for error compensation during fabrication and structure optimization. As multiple elements are usually fabricated on each substrate, the latter will have to be divided into smaller pieces for characterisation. This will be achieved by employing a laser cutting modality which is also integrated in the TPP system.Within the modular Nanoproduction Facility the Laser Nanofabrication System (TPP) will be combined with a UV-nanoimprint lithography (UV-NIL) system for precise and fast replication of 2D and 2.5D structures and an Optical Metrology System for precise measurement of the relevant parameters such as structure geometries, dimensions, feature sizes, and surface roughness. All modules will be implemented in a multi-scale production chain for the realization of various integrated optical elements, subsystems, and entire functional systems for a variety of applications ranging from optical networks over monitoring and sensing to imaging and metamaterials.The proposed Laser Nanofabrication System (TPP) - and ultimately the modular Nanoproduction Facility - provides a combined production and characterization environment and will be broadly utilized by the groups of the four main users and a number of additional collaborators. It will be located in a common infrastructure for optimal access and operation. One research group of the applicants will organize operation and service.The requested system is currently not available in the groups of the planned users.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Laser Nanofabrication System
• Instrumentation Group: 0910 Geräte für Ionenimplantation und Halbleiterdotierung
• Applicant Institution: Gottfried Wilhelm Leibniz Universität Hannover
• Leader: Professor Dr. Bernhard Roth