MEMS Technology for adaptive Sensors (C07)

• Subject Area: Microsystems ; Biomaterials ; Thermodynamics and Kinetics as well as Properties of Phases and Microstructure of Materials
• Term: since 2021
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 434434223

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 1461: Neurotronics: Bio-inspired Information Pathways
• Applicant Institution: Christian-Albrechts-Universität zu Kiel
• Project Heads: Dr. Tzvetan Ivanov, Ph.D.; Professor Dr. Martin Ziegler