Focused ion beam scanning electron microscope (FIB-SEM)

• Subject Area: Systems Engineering
• Term: Funded in 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 466823919

The proposed large-scale dual-beam device will be used for fast, highly accurate and automated preparation of TEM lamellae. It is to be used in the planned transmission electron microscopy centre at Chemnitz University of Technology, where it will take over the main part of these precision preparation tasks and ensure a high throughput of samples with a wide range of properties.The most important prerequisites for this are powerful ion and electron optics, the possibilities of in-situ nano-manipulation, a platinum, carbon and xenon difluoride gas injection system, and high-resolution material analysis. In addition, appropriate detectors are needed to select a suitable sample location as well as for the inspection of the lamellae. For an efficient workflow, the instrument should allow for extensive automation. This not only shortens the time required per lamella, but also allows the preparation of several samples overnight.Exactly these criteria are fulfilled by the FIB/REM combination planned here. The device has the required performance, universality and the necessary unique selling propositions and is strategically in line with the professional orientation of Chemnitz University of Technology and the TEM Centre and is also characterized by an excellent price-performance ratio. It is essential for the future success of research and development, teaching and university-wide initiatives.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Focused Ion Beam Rasterelektronenmikroskop (FIB-REM)
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Technische Universität Chemnitz
• Leader: Professor Dr.-Ing. Bernhard Wunderle