Kinetics and spectroscopy of fluorine-silicon compounds

• Applicant: Professor Dr. Jürgen Troe
• Subject Area: Physical Chemistry of Molecules, Liquids and Interfaces, Biophysical Chemistry
• Term: from 2022 to 2023
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 495852613

This project studies the thermal dissociation of simple silicon-fluorine compounds by employing the shock wave method. Theoretical modeling accompanies the experiments. The considered reactions are of relevance for practical applications such as plasma-etching in microelectronics or thin-film deposition of silicon. In spite of this, kinetic and spectroscopic data are known only to a limited extent. First experiments in this project showed evidence for unusual autocatalytic mechanisms which may also play some role in fluorocarbon chemistry.

• DFG Programme: Research Grants
• International Connection: Argentina
• Cooperation Partner: Professor Dr. Carlos J. Cobos